RF POWER SUPPLY and MATCHINGBOX
5. Operation methods
17
PHS-N internal section
External controller
Figure 5-8 External control (EXT.CONT) pin assignment
1
+
-
9 to 15 (COM)
CH01
2
+
-
CH02
3
+
-
CH03
4
+
-
CH04
5
CH05
6
+
-
CH06
7
CH07
8
+
-
CH08
9 to 15 (COM)
9 to 15 (COM)
9 to 15 (COM)
9 to 15 (COM)
9 to 15 (COM)
9 to 15 (COM)
9 to 15 (COM)
Summary of Contents for PHS-04N
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Page 17: ...RF POWER SUPPLY and MATCHINGBOX 3 Preparation 9 Figure 3 2 System wiring example...
Page 28: ...RF POWER SUPPLY and MATCHINGBOX 7 Reference materials 20 Figure 7 1 PHS 04N External diagram...
Page 29: ...RF POWER SUPPLY and MATCHINGBOX 7 Reference materials 21 Figure 7 2 PHS 08N External diagram...