Ulvac PMB-040C, Instruction Manual

Page 1: ...NSTRUCTION MANUAL MECHANICAL BOOSTER PUMP PMB 040C PMB 060C Before using this product be sure to read this operation manual Keep this manual with care to use at any time ULVAC Inc Components Division...

Page 2: ......

Page 3: ...the product might not be ensured if any of the devices put together did not conform to same regulations or the product itself was modified ULVAC shall be not liable to guarantee performance and safet...

Page 4: ...l and on the product to make clear items to observe Descriptions attached to the symbol are classified as illustrated below 0 2 Meanings of Safety Symbol Marks DANGER If the user makes a mistake in ha...

Page 5: ...uct to use it in long term You are requested to fully understand the safety precautions specifications and operation methods of the product DANGER Toxic and combustible combustion supporting gases oth...

Page 6: ...ifications and or characteristics of the product and description of the Instruction Manual are subject to change without prior notice for improvement Any change shall update the version number at the...

Page 7: ...isk of giving damage to your back as the load larger than safety standard shall be required to transfer the product PMB 040C 970kg Without Motor PMB 060C 1100kg Without Motor Be sure to use the loadin...

Page 8: ...safety e g Fire Defense Law Electric Equipment Technology standard Internal line cord in the country and region you use the product Ensure to have a correct grounding You have a risk of getting elect...

Page 9: ...tling repairing or remodeling the product You have a risk of getting injured or electrical shock by a fire or erroneous move Do not touch the motor vacuum pump or piping during the pump operation and...

Page 10: ...orne by you Shortage of the cooling water might give damage on the bearing gear and rod sealing which results in contact of the rotor and casing and operation stop For reference The standard quality o...

Page 11: ...remains very hot wile after having stopped the Pump Be sure to take it off after the Pump has sufficiently cooled down Fully seal off the air intake and exhaust ports of the removed pump with blind f...

Page 12: ...cm2G Gauge pressure Do not run the Pump on blocking the Exhaust outlet or putting any device that might hamper gas passage onto the outlet There is a risk that the pressure inside the vacuum pump rise...

Page 13: ...xi 6 This indicates the rotation direction of the belt In this machine the motor pulley becomes different when moving at 60Hz and when moving at 50Hz Confirm the description of frequency on the label...

Page 14: ...ading machinery There is a risk that the pump might drop or lay down when attempted unreasonable operation or machinery setup was not sufficient You are strictly restricted to enter beneath the pump U...

Page 15: ...joint 1pce 0 5 2 Transfer WARNING You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product PMB 040C 970kg Without Motor PMB 060C...

Page 16: ...n a There shall be no corrosion behavior or explosive gas b There shall be no freeze or dew formation c There shall be no dust d It shall be in house e Another pump shall not be put on the pump The Pu...

Page 17: ...cur by the striking current of the motor at the selected rating of the present MCCB molded case circuit breaker ELCB earth leakage circuit breaker MC magnetic contactor and THR thermal relay In order...

Page 18: ...y material 1 1 1 3 Warning Electric shock 2 1 1 4 Warning Explosion 2 1 1 5 Caution High temperature 3 1 1 6 Caution Leakage of hot cooling water 3 1 2 Chemical Material Safety Data Sheet SDS 4 2 Pump...

Page 19: ...8 Checking abnormal noise vibration 35 5 2 9 Checking inside of casing 36 5 3 Checkup after Storage for a Long Period 36 5 4 Overhaul 36 5 5 Trouble shooting 37 6 Removal Transport 41 6 1 Operation Pr...

Page 20: ...mping speed curves 11 Fig 8 Recommended circuit diagram 19 Fig 9 Lubrication to mechanical seal 24 Fig 10 Oil pot 25 Fig 11 Belt tension measurement 26 Fig 12 Evacuation by mechanical booster pump exa...

Page 21: ...y hazardous gas such as toxic and combustible Before making an inspection etc wear personal protective equipment suitable for toxic substances for use To overhaul or dispose ask the special agency to...

Page 22: ...ricity to do checking or installation Never attempt to put in the hand or bar into the opening of the Motor Motor terminal mount gets burnt Tighten close the terminal Check the tightening once a month...

Page 23: ...erature sufficiently cools down after having stopped the pump to conduct check or something 1 1 6 Caution Leakage of hot cooling water Factors Avoidance methods and measures Kept operating without sup...

Page 24: ...cknowledge the toxic characteristics described on the SDS Please do not use the chemical material except the above mentioned chemical material vacuum pump oil CAUTION SDS is posted as referential to e...

Page 25: ...ut contacting each other while maintaining a very small clearance between them by a timing gear The rotors and the casing are constructed in such a manner that the rotors can rotate while maintaining...

Page 26: ...er volume L min 10 Primary side pressure MPa 0 1 0 3 Inlet outlet differential pressure MPa 0 05 Cooling water temperature 5 5 30 Note This catalog uses the International System of Units The conversio...

Page 27: ...YK10 0015 DI 002 03 7 2 3 Dimensional drawing Fig 3 Dimensional drawing PMB 040C...

Page 28: ...YK10 0015 DI 002 03 8 Fig 4 Dimensional drawing PMB 060C...

Page 29: ...YK10 0015 DI 002 03 9 Fig 5 Foundation Drawing Model PMB 040C...

Page 30: ...YK10 0015 DI 002 03 10 Fig 6 Foundation Drawing Model PMB 060C...

Page 31: ...aporated again 2 4 2 Pumping speed The pumping speed of the mechanical booster pump changes depending on the inlet pressure Also the pumping speed of the mechanical booster pump fluctuates depending o...

Page 32: ...essure of more than the maximum intake pressure Refer to the Table 2 Specifications and the pump generates a large amount of heat causing motor burn out and pump seizure Therefore do not carry out ope...

Page 33: ...product from all energy sources such as electricity and cooling water 3 1 Installation Storage Conditions Install the machine horizontal to a place where there are less dust and humidity Make a layout...

Page 34: ...the Vacuum chamber 3 Put the Vacuum valve Vacuum gauge and Leak valve between the Vacuum chamber and the Pump 3 3 2 Outlet port Piping JIS B 2290 1998 Vacuum technology Flange dimensions Attachment bo...

Page 35: ...If obliged to conduct a welding work close to or on the inlet take a measure such as to remove the pump unit or put a cover sheet on the inlet in order not to allow any foreign substance enter inside...

Page 36: ...e pneumatic air through the cooling water inlet CAUTION If you use several pumps be sure to connect the cooling water pipes parallel Cooling capacity might come down if connected them serial and cause...

Page 37: ...s flowing CAUTION It is recommended to use water with a low number of impurities e g industrial water see the table below as the cooling water for this product Depending on the water quality the cooli...

Page 38: ...de for looseness When making connections be sure to provide safety circuits such as circuit breakers magnetic contactors and thermal overcurrent contactors There is a risk of a fire electric shock in...

Page 39: ...her look at the selection of MCCB ELCB and THR For the motor protection thermal of PMB 040C and 060C a time lagged type is recommended Example Fuji Electric FA Components Systems Co Ltd Time lagged ty...

Page 40: ...60Hz 52 0 449 52 0 230V 60Hz 50 6 469 50 6 400V class motor 400V 50Hz 29 4 242 100 29 4 22 400V 60Hz 27 8 204 27 8 440V 60Hz 26 0 224 26 0 460V 60Hz 25 3 235 25 3 PMB 060C 18 5 200V class motor 200V 5...

Page 41: ...0V to 230V 100 or less 400V to 460V 10 or less Install an overcurrent protection device in the electrical connections to prevent burnout of the motor due to an overcurrent Install an overload protecto...

Page 42: ...Place In oiling During operating Cover oil gauge on the gear side Put the oil up to the upper limit level Oil level shall be available between level lines of 2 pieces of the oil gauge Cover oil gauge...

Page 43: ...and return the Mechanical booster inside to the atmospheric pressure Chamber containing the oil becomes vacuum during operation Taking off the plug during operation would cause a large leak and give...

Page 44: ...chanical seal is also lubricated In order to prevent the oil shortage of the mechanical seal when operating the pump after stopping the pump for more than 3 months or after having relocated the pump b...

Page 45: ...allic noise of high frequency Receiving spilt oil in the oil pot prevents environmental pollution Connect between the oil pot and the pump body using the attached nylon tube and secure it using cable...

Page 46: ...reases by the extension and fall in the pulley groove Re tension the belt 24 hours later after initial start And 1week later re tension the belt Maintenance the belt Please check the belt tension at o...

Page 47: ...lt When re tightening Model Operating frequency Reference value of flexible volume mm Range of flexible load N 1 pce Range of deflection load N 1 pce 50Hz 60Hz 50Hz 60Hz 16 3 16 9 57 8 63 7 Replace an...

Page 48: ...oil If the oil level becomes lower than the lower limit during the operation the bearings gears shaft seals etc are damaged causing leakage abnormal noise overloaded motors or a shutdown When newly f...

Page 49: ...booster pump or by attaching a blind flange to the air intake b Run the backing pump to exhaust inside the Mechanical booster pump This time confirm that the pressure of the inlet or outlet of the boo...

Page 50: ...l the Pump cools down after having stopped operation Apply an appropriate protection to avoid to touch the surface as necessary However if the environment was highly humid keep the mechanical booster...

Page 51: ...AUTION When turning off the power once and then restarting the pump check that the rotor stops and then turn on the power supply 1 Close the main valve inlet side of the Mechanical booster pump and st...

Page 52: ...the appropriate range 2 Whether the Vacuum pump oil is discolored or not 3 Whether there is no oil leak from the pump 4 Whether there is no oil leak from the Mechanical seal 5 Whether the cooling wate...

Page 53: ...ure becomes high first and then the movement of the mechanical friction parts of the pump becomes worse CAUTION Depending on the use conditions the pump oil may deteriorate in a extremely short period...

Page 54: ...short period of time It is recommended to perform the first replacement of the pump oil within ten days and after checking the degree of contamination of oil decide the oil replacement cycle Proceed...

Page 55: ...al seals need to be replaced Contact the nearest service center 5 2 6 Checking cooling water Check whether or not a specified amount of cooling water flows Check the cooling water for leakage 5 2 7 Ch...

Page 56: ...depending on the use conditions it is recommended to periodically overhaul the pump An overhaul is necessary to maintain the performance including safety and also continue production on schedule Pleas...

Page 57: ...coming 3 5 7 Run only by the Motor Is the Rotation and or current value correct Check motor Replace the Motor 3 5 8 Lubricating oil is below the level line Check for oil flow into the rotor casing Re...

Page 58: ...2 9 Pipe connected to the Suction inlet is thin or connection distance is long Connect a pipe wider than inlet diameter and shorten the connection distance between the Vacuum chamber 10 Casing inside...

Page 59: ...Clattering is heard Disassemble and repair the pump Re adjust timing 5 4 9 Is rasping noise always heard Roaring noise is heard Disassemble and repair the pump Replace bearing and gear 5 4 10 Metal n...

Page 60: ...use 3 7 Water leak outside the Pump 1 Coolant joints and so on got loose or not tighten Check and repair Joints and so on 3 4 Rotation is uneven and so it was going not to rotate gradually 1 The motor...

Page 61: ...ut Motor Be sure to use the loading machinery such as mobile crane to lift up the Pump or load it on the pallet and fix it with Jack and run the Pallet truck for its transfer Never try to enter beneat...

Page 62: ...e requested to bear the cost and charges relating to the disposal WARNING You should ask a special disposal agency for the disposal particularly if the Pump has exhausted any toxic gas hazardous to th...

Page 63: ...n under normal conditions such as the operating temperature range and the power supply in use 2 Direct export transaction Products damaged at the time of delivery due to transportation However for dir...

Page 64: ...dary loss you suffer due to any complaint about violation of patents from a third party to us 8 The reason of the failure deemed below the specified usage condition by ULVAC technical staff 9 Consumab...

Page 65: ...se 4 4 Fluor rubber O ring 2 G110 Mechanical seal 1 1 Fluor rubber O ring Gs465 Side cover 2 2 Fluor rubber O ring 2 G85 Shaft 8 8 Fluor rubber O ring 2 P22 4 Filler port drain port 4 4 Fluor rubber O...

Page 66: ...his method is used when the vacuum chamber is small in size that is when a long time can be spent for rough pumping Since the mechanical booster pump does not operate when rough pumping is under way t...

Page 67: ...it can be interlocked with the vacuum switch by making the roughing valve a compressed air driven type The vacuum switch is available in two types mechanical and electrical It is installed on the vac...

Page 68: ...ion Remarks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful subs...

Page 69: ...o jp en Service Centers http www ulvac co jp en support service center Sales O ces http www ulvac co jp en support sales o ces 253 8543 TEL 0467 89 2261 108 0075 TEL 03 5769 5511 532 0003 TEL 06 6397...