YK10-0015-DI-002-03
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5.2.4 Oil leakage check
In the event of an oil leakage from the shaft-seal part or the pump body, it need to be repaired.
The O-rings used in this machine are described at the end of this document. Contact the nearest
service center.
5.2.5 Checking mechanical seal for oil leakage
The mechanical seals structurally cause a slight oil leakage under normal conditions. Approx. one
month after the startup is the running-in period of the sealing surfaces of the mechanical seals and
the amount of leakage may increase temporarily.
If the amount of oil leakage from the mechanical seals reaches 0.3 ml/hour or more after the use for
a certain period of time, the mechanical seals may deteriorate. In such a case, the mechanical seals
need to be replaced. Contact the nearest service center.
5.2.6 Checking cooling water
Check whether or not a specified amount of cooling water flows.
Check the cooling water for leakage.
5.2.7 Checking wire net at air intake
The air intake may be clogged by dust etc. included in gas to be sucked from the vacuum chamber,
degrading the pump performance. If the wire net is contaminated, clean it.
In addition, take special care in early stages of starting the device as weld scale in the piping may
fall.
5.2.8 Checking abnormal noise/vibration
Checking the areas around the pump
(1) Is there any looseness of the bolts and nuts used to fix the pump?
(2) Is there any looseness in the fixed pipes connected to the air intake/exhaust ports?
(3) Does any leakage occur from the piping or the valves?
Checking the pump
See "5.5: Trouble check list."
If the trouble persists even after checking the content of the list, contact the nearest service center.
Summary of Contents for PMB-040C
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