Ulvac PMB100D, Instruction Manual

Page 1: ...AL BOOSTER PUMP PMB100D PMB300D1 PMB600D 1 PMB1200D 1 PMB2400D 1 1 IE3 motor adoption Before using this product be sure to read this operation manual Keep this manual with care to use at any time ULVA...

Page 2: ......

Page 3: ...Declaration of Conformity...

Page 4: ...ensured if any of the devices put together did not conform to same regulations or the product itself was modified ULVAC shall be not liable to guarantee performance and safety in such cases above Any...

Page 5: ...ed as illustrated below 0 2 Meanings of Safety Symbol Marks DANGER If the user makes a mistake in handling it indicates an imminent possibility that the user is subject to death or heavy injury WARNIN...

Page 6: ...or combustion susceptible gas other than inactive gas is not allowed as there is a risk of leakage of the gas from the Pump unit if it was exhausted by the vacuum pump DANGER Use of the toxic combusti...

Page 7: ...edge that specifications and or price of the product and description of the Instruction Manual are subject to change without prior notice for improvement Any change shall update the version number at...

Page 8: ...own when attempted unreasonable operation or machinery setup was not sufficient You are strictly restricted to enter beneath the Pump Transfer WARNING You have a risk of giving damage to your back as...

Page 9: ...g the operation Power Supply wiring Mounting WARNING Check and ensure that any of hazardous energy is blocked before starting the operation Entitled staff should conduct the wiring operation Erroneous...

Page 10: ...value of the Pump shall be 0 03MPaG 0 3kg cm2 G Gauge pressure WARNING Do not operate the Pump in hazardous area where there is a risk of creating hazardous atmosphere by explosive gas It might cause...

Page 11: ...sed by over heat CAUTION Ensure to flow the cooling water during operation Required Cooling water shall be Cooling water volume PMB100D air cooling PMB300D 2 L min or more PMB600D 2 L min or more PMB1...

Page 12: ...Inlet and outlet piping remains very hot while after having stopped the Pump Be sure to take it off after the Pump has sufficiently cooled down Make airtight completely the Pump exhaust outlet with a...

Page 13: ...ture Ensured pressure value of the Pump shall be 0 03MPaG 0 3kg cm2G Gauge pressure Do not run the Pump on blocking the Exhaust outlet or putting any device that might hamper gas passage onto the outl...

Page 14: ...02 08 xi 6 PMB100D multi motor specification only Before starting the pump check first that the connection is matched to used voltage Refer to 3 5 Electrical Connection Fig 1 Warning Label 1 PMB300D P...

Page 15: ...or Motor Operated Air Compressors Vacuum Pumps and Painting Equipment by replacing the warning label according to the figure below Fig 3 Warning Label replacement 1 PMB1200D PMB2400D Hazardous voltage...

Page 16: ...K11 0016 DI 002 08 xiii Fig 4 Warning Label replacement 2 Hazardous voltage Hot heating part present There is a risk of explosion Checkup after storage for a long period Installation location attentio...

Page 17: ...asonable operation or machinery setup was not sufficient You are strictly restricted to enter beneath the Pump Upon delivery of the product check first that the delivered is exactly what you have orde...

Page 18: ...lift up the Pump or load it on the pallet and fix it and run the Pallet truck for its transfer Never try to enter beneath the Pump unit when lifted it up Use sling belts to load unload the unit Do not...

Page 19: ...shall be no corrosion behavior or explosive gas b There shall be no freeze or dew formation c There shall be no dust d It shall be in house e Another pump shall not be put on the Pump The Pump shall...

Page 20: ...ion of the pipe to the PMB 100Dserves as the installation of the pump The pipe should be able to support the weight of the pump example the pipe is welded to the rack The pump has four tapped holes at...

Page 21: ...D The pump has four holes The pump is fixed with four bolts More than M12 x 20mm Kurashiki Kako Ltd Model KLB 8030 PMB2400D The pump has four holes The pump is fixed with four bolts More than M16 x 20...

Page 22: ...t equipped with the protective device Put an overload protective device to connect through the motor with the Power Supply Refer to 3 5 Electrical Connection to select the overload protective device I...

Page 23: ...rous materials 1 1 1 2 Warning Transfer of heavy material 1 1 1 3 Warning Electric shock 1 1 1 4 Warning Explosion 2 1 1 5 Caution High temperature 2 1 1 6 Caution Leakage of hot cooling water 2 1 2 C...

Page 24: ...inverter optional 46 5 5 Motor control equipment air cooled type with atmospheric pressure operating specification inverter 52 5 6 Separate Evacuation of Lubricating Chamber 53 5 6 1 Preparation 54 5...

Page 25: ...6 3 Checkup after storage for a long period 70 6 4 Overhaul 70 6 5 Trouble shooting 71 7 Removal transport 81 7 1 Operation procedure 81 8 Disposal 82 9 Warranty Clauses 83 9 1 Warrantable Items 83 9...

Page 26: ...0D 300D 600D Standard 18 Fig 17 Pumping speed curves MODEL PMB1200D 2400D Standard 18 Fig 18 Pumping speed curves MODEL PMB300D 600D 19 Fig 19 Pumping speed curves MODEL PMB1200D 2400D 19 Fig 20 Pumpi...

Page 27: ...e 6 Oil level gauge 26 Table 7 Rated current value of the standard motor 34 Table 8 Optional parts 53 Table 9 Troubleshooting 71 Table 10 Main displacement parts list for PMB100D 85 Table 11 Main disp...

Page 28: ...rning Transfer of heavy material Factors Avoidance methods and measures Getting injured on transferring the pump Pump weight PMB100D 26kg PMB300D 51kg PMB600D 82kg PMB1200D 115kg PMB2400D 260kg Only t...

Page 29: ...e surface temperature is high you have a risk of getting burnt by accidentally touching it with the hand or the like Refrain from touching the pump during operation Wait until the temperature sufficie...

Page 30: ...with attention to acknowledge the toxic characteristics described on the SDS Please do not use the chemical material except the above mentioned chemical material vacuum pump oil CAUTION SDS is posted...

Page 31: ...other while maintaining a very small clearance between them by a timing gear The rotors and the casing are constructed in such a manner that the rotors can rotate while maintaining a small clearance...

Page 32: ...losed fan cooled Multi rated Motor Overseas 220 240V 50Hz 208 240V 60Hz 380 415V 50Hz 380 460V 60Hz 200 240V 50 60Hz 380 480V 50 60Hz PMB300 600 1200 2400D IE3 motor 2 Motor Destination Corresponding...

Page 33: ...460 kg 26 51 82 115 260 VD40 VD60 9 VD90 9 VS2401 VS650 PKS 070 0 05 CE cTUVus 5 30 Inlet port VG80 Cooling water Cooling method 5 Air cooled Water cooled Primary side pressure 0 3 43 5 Inlet outlet d...

Page 34: ...the inverter for water cooled operation More than 1 hour operation in 300Pa 4000Pa range could be cause of damage in the case of the PMB600D 1200D and 2400D Select water cooled type in that case 6 Mak...

Page 35: ...Induction Motor 0 75 2 RATED CURRENT A RATED VOLTAGE V the connection inside the terminal box 15 kW poles delta star delta star 12 7A 200V 50Hz 12 0A 220V 50Hz 12 4A 240V 50Hz 12 6A 200V 60Hz 12 2A 2...

Page 36: ...to the instruction manual of the inverter please be prepared by the customer the necessary parts Structure of the Mechanical seal would allow a slight oil leak even the sealing was correct In case yo...

Page 37: ...ig 8 Electrical wiring diagram Fig 9 Terminal box internal wiring diagram WARNING Before wiring please check the power supply voltage to be used Check the power supply voltage to be used please do the...

Page 38: ...ow Cooling water and power supply is required And you prepare wiring safety circuit and exhaust processing equipment etc Fig 10 Location of vacuum pump in host device 1 1 1 1 1 In the case of air cool...

Page 39: ...YK11 0016 DI 002 08 12 2 4 Dimensional drawing Fig 11 Dimensional drawing PMB100D...

Page 40: ...YK11 0016 DI 002 08 13 Fig 12 Dimensional drawing PMB300D...

Page 41: ...YK11 0016 DI 002 08 14 Fig 13 Dimensional drawing PMB600D...

Page 42: ...YK11 0016 DI 002 08 15 Fig 14 Dimensional drawing PMB1200D...

Page 43: ...YK11 0016 DI 002 08 16 Fig 15 Dimensional drawing PMB2400D...

Page 44: ...normal condition 2 5 2 Pumping Speed The pumping speed of the mechanical booster pump changes depending on the inlet pressure Also the pumping speed of the mechanical booster pump fluctuates dependin...

Page 45: ...100 1000 10000 100000 Pumping Speed m3 h Pressure Pa PMB300 60Hz VD60 60Hz PMB300 50Hz VD60 50Hz PMB600 50Hz VD90 50Hz PMB100 50Hz VD40 50Hz PMB600 60Hz VD90 60Hz PMB100 60Hz VD40 60Hz 0 500 1000 150...

Page 46: ...2400D Water cooled specification with inverter optional 0 100 200 300 400 500 600 700 0 1 1 10 100 1000 10000 100000 Pumping Speed m3 h Pressure Pa PMB300 60Hz VD60 60Hz PMB300 60Hz VD60 50Hz PMB600...

Page 47: ...B1200D 2400D Air cooled specification with inverter optional Rotational speed of the mechanical booster pump with inverter is 60Hz 0 100 200 300 400 500 600 700 0 1 1 10 100 1000 10000 100000 Pumping...

Page 48: ...verloaded at an intake pressure of more than the maximum intake pressure Refer to the Table 2 Specifications and the pump generates a large amount of heat causing motor burn out and pump seizure There...

Page 49: ...e vacuum chamber is small in size that is when a long time can be spent for rough pumping Since the mechanical booster pump does not operate when rough pumping is under way the gas to be exhausted is...

Page 50: ...d which can be interlocked with a vacuum switch The vacuum switch is available in two types mechanical and electrical It is installed on the vacuum chamber or near the intake port of the mechanical bo...

Page 51: ...t consult with our company Furthermore this pump guarantees reliability by the operation frequency 50Hz and 60Hz 2 9 Motor control equipment air cooled type with atmospheric pressure operating specifi...

Page 52: ...n Be sure to clear any energy sources e g electricity coolant and so on of the product before installing or removing the product 3 1 Storage Installation Install the machine horizontal to a place wher...

Page 53: ...he upper limit level Table 6 Oil level gauge MODEL Place In oiling During operating PMBD Series Oil level gauge on the Cover of gear side Put the oil up to the upper limit level Oil level shall be ava...

Page 54: ...over lubricated so as to match the upper level Be sure to check the oil level under operation stop on the room temperature around 20 Oil level might get higher during operation due to the oil tempera...

Page 55: ...e on the bearing gear and shaft sealing and result in leak noise motor overload and operation stop Structure of the Mechanical seal would allow a slight oil leak even the sealing was correct In case y...

Page 56: ...earance to keep rotation and easily gets impossible to rotate by any foreign substance entered inside Clear the sand completely after having sand blasted the vacuum chamber Pay attention not to give d...

Page 57: ...e gas and substance other than inactive gas is not allowed as there is a risk of causing fire or explosion inside the Pump unit if it was exhausted by the vacuum pump It is not allowed to use any corr...

Page 58: ...of the motor CAUTION Wash sufficiently inside the Vacuum chamber pipes Vacuum valve and so on to connect them to the Pump If dirty unit were connected it would cause a trouble such like raise the ulti...

Page 59: ...mined by considering the voltage drop of the wire WARNING Install and operate the product in compliance with the laws and regulations relating to the safety e g Fire Defense Law Electric wiring regula...

Page 60: ...or less 380V 460V Ground to 10 ohm or less Use a safety circuit which keeps the motor from starting a fire which is caused by over current Install a safety circuit suitable for the capacity of the mo...

Page 61: ...0 98A 0 98A 415V 50Hz 415V 50Hz 0 88A 0 88A 380V 60Hz 380V 60Hz 0 85A 0 85A 460V 60Hz 460V 60Hz 3 10A 3 10A 200V 50Hz 200V 50Hz 3 00A 3 00A 220V 50Hz 220V 50Hz 3 10A 3 10A 240V 50Hz 240V 50Hz 3 10A 3...

Page 62: ...YK11 0016 DI 002 08 35...

Page 63: ...80V 60Hz 4 20A 4 20A 460V 60Hz 460V 60Hz 12 7A 12 7A 200V 50Hz 200V 50Hz 12 0A 12 0A 220V 50Hz 220V 50Hz 12 4A 12 4A 240V 50Hz 240V 50Hz 12 6A 12 6A 200V 60Hz 200V 60Hz 12 2A 12 2A 208V 60Hz 208V 60Hz...

Page 64: ...V 50Hz 380V 50Hz 13 8A 13 8A 415V 50Hz 415V 50Hz 13 5A 13 5A 380V 60Hz 380V 60Hz 11 9A 11 9A 460V 60Hz 460V 60Hz For Japan For America For Europe and China PMB2400D 7 5 Motor Multi rated delta 40 8mm2...

Page 65: ...YK11 0016 DI 002 08 38...

Page 66: ...he Coolant and cause the interlock so that the Pump stops if the cooling water flows less than specified volume When the operation stopped in winter the water piping and the pump have a risk of breaki...

Page 67: ...the floor around the Pump We recommend you to put the Leak sensor on the floor beneath the Pump and engage it with the interlock system of the equipment Close the Coolant supply valve HWSV immediately...

Page 68: ...Shortage of the cooling water might give damage on the bearing gear and shaft sealing which results in contact of the rotor and casing and operation stop CAUTION Never fail to lubricate the machine I...

Page 69: ...e opening in 3 5 sec after stopping the motor for the pump drive do connection so that it gangs with the motor 4 2 Operation Start 4 2 1 Test run Follow the procedure 1 4 below to start operation of t...

Page 70: ...g the Oil level gauge to check the rotation direction Gear rotation shown in the Fig 15 is correct Refer to the pump s nameplate too If it rotated reverse check the motor wire connection The Motor is...

Page 71: ...damage to the Pump Further the oil might flow back to the vacuum chamber if used the Oil rotation pump as the backing pump If failed in closing the Vacuum valve the vacuum might leak from the Exhaust...

Page 72: ...YK11 0016 DI 002 08 45...

Page 73: ...Air cooled J25F Fluorine based synthetic oil Chemically stable and resistant to heat I will not produce a solid such as degradation products 5 4 Motor control equipment water cooled type with atmosph...

Page 74: ...N Since not meet the entry requirements of the motor and inverter as approved will be handled as a single pump not apply CE marking and certification NRTL Mounting dimensions refer to Section 5 6 Opti...

Page 75: ...ol wiring for the inverter configuration and start up S1 SC please do not change so we are at the time of shipment Please However if you activate the remote operation under the control of the input of...

Page 76: ...H2 03 Terminal P2 Function Selection open collector 2 Speed Agree 1 12 A2 12 User Parameter H3 09 Terminal A2 Signal Level Selection Sets the input signal level for terminal A2 2 4 to 20mA 13 A2 13 Us...

Page 77: ...flowing prescribed amount To PMB100D it does not have this switching function 5 If you want to use the analog input command please ON 6 Please be ON when you reset the inverter fault 7 S5 or I will s...

Page 78: ...100D you do not have a water cooled specification Control wiring for the inverter configuration and start up S1 SC please do not change so we are at the time of shipment Please However if you activate...

Page 79: ...more pressure held in a pressure range of 300 4000Pa Setting and control wiring for starting S1 SC please do not change so we are at the time of shipment However if you be started by remote control p...

Page 80: ...osition of the exhaust port of rooms lubrication refer to Section 5 6 Optional attachment figure Table 8 Optional parts Description Function Oil trap flange Oil trap plug Allows pumping of the lubrica...

Page 81: ...o the intake port 2 Run the pump for evacuating the lubricating chamber to evacuate the lubricating chamber of the mechanical booster pump Then run the backing pump to evacuate the mechanical booster...

Page 82: ...of the mechanical booster pump Then start the backing pump to evacuate the mechanical booster pump and piping 2 Open the main valve above the inlet side of the mechanical booster pump to evacuate the...

Page 83: ...YK11 0016 DI 002 08 56 5 7 Optional attachment figure Fig 27 PMB100D Optional attachment figure...

Page 84: ...YK11 0016 DI 002 08 57 Fig 28 PMB300D Optional attachment figure...

Page 85: ...YK11 0016 DI 002 08 58 Fig 29 PMB600D Optional attachment figure...

Page 86: ...YK11 0016 DI 002 08 59 Fig 30 PMB1200D Optional attachment figure...

Page 87: ...YK11 0016 DI 002 08 60 Fig 31 PMB2400D Optional attachment figure If you have installed the intake and exhaust ports ISO F flange...

Page 88: ...YK11 0016 DI 002 08 61 Fig 32 PMB2400D Optional attachment figure If you have installed the inlet ISO K flange...

Page 89: ...YK11 0016 DI 002 08 62 Fig 33 Dimensional drawing PMB2400D Horizontal exhaust model...

Page 90: ...following points at least once per three days while you continue operation In the high load operating raise the frequency of confirmation 1 Whether the Vacuum oil pump oil volume is between two level...

Page 91: ...Erroneous wiring work might cause a fire Conduct the wiring operation correctly in compliance with laws and rules concerning the safety e g Fire Defense Law Electric Equipment Technology standard Int...

Page 92: ...ecommended to replace the first pump oil within 10 days after operation start and see how it got dirty to determine the oil replacement cycle Proceed as follows Refer to 3 2 1 Shut down the pump and o...

Page 93: ...reatment described on the SDS CAUTION Ensure to use the vacuum pump oil designated by ULVAC Operation using oil other than designated shall be out of our scope of guarantee as it might impair the pump...

Page 94: ...e be sure to stop running the Pump and return the Mechanical booster inside to the atmospheric pressure However a deterioration of the mechanical seal may be considered if the lubrication oil pooled 0...

Page 95: ...Trouble check list Should the condition was not recovered after having checked points indicated there please contact the closest Service center 6 2 8 Check the Rotor and Casing Stop the mechanical boo...

Page 96: ...r cable of the motor 2 To remove the bolts form the motor And remove the motor from the pump 3 Now you can check the spider of the coupling Replace the spider with a new one Put the new coupling spide...

Page 97: ...ice Center close to you listed at the end of the document as for the overhaul Do not forget to fill and submit the Contamination certificate enclosed in the end of the document WARNING We would be obl...

Page 98: ...of the Casing Rotor Cover and so on 6 4 5 Reactive agent accumulated inside the Pump while the Pump was stopped after having exhausted the reactive gas Any deposits on the rotor surface Conduct the o...

Page 99: ...YK11 0016 DI 002 08 72...

Page 100: ...ump have burnt out Conduct the overhaul 6 4 14 The oil is not supplied by the specified volume a Oil flow to outside of pump b Oil flow to inside of casing c Oil flow from mechanical seal Control the...

Page 101: ...ntered the pump Conduct the overhaul Clean the pump to eliminate foreign matter 6 2 8 6 4 4 Components inside the pump have burnt out Conduct the overhaul 6 4 5 Coolant does not flow Specified volume...

Page 102: ...r 2 6 5 Metal mesh at the inlet is clogged Remove the pipe above the inlet and wash the mesh 4 6 2 6 6 The oil is not supplied by the specified volume Control the oil level Supply the oil by the speci...

Page 103: ...seal 3 2 2 6 4 15 Is the ultimate pressure of backing pump normal Pressure is over the prescribed value of the mechanical booster pump Check the backing pump Replacement of the backing pump 2 2 16 Coo...

Page 104: ...around the Pump is enclosed Make the ventilation available 0 5 3 6 High temperature Please use it in environment with the air conditioning 0 5 3 7 There is a leak in the pipe connecting with the Pump...

Page 105: ...YK11 0016 DI 002 08 78...

Page 106: ...position and stop it 2 6 4 The rotor is in contact with each other Conduct the overhaul 6 4 2 Pressure is over the maximum pumping pressure Check pressure on intake and exhaust sides Check the backing...

Page 107: ...se voltage Check the power supply 3 5 2 Oil is dirty Replace with new oil Conduct the overhaul Inside cleaning 3 2 6 2 1 6 2 2 6 2 3 3 Foreign substance entered inside the Pump impaired the Motor rota...

Page 108: ...only the entitled person for special gas handling should be in charge of the removal work Keep applying a plate displaying the name of exhausted gas on a place easily seen on the Pump WARNING You hav...

Page 109: ...any toxic gas Note that you are requested to bear the cost and charges relating to the disposal WARNING You should ask a special disposal agency for the disposal particularly if the Pump has exhausted...

Page 110: ...n Japan Product which has damage caused by a failure on delivery Products not satisfying the standard specifications although the product is used under the service conditions described in this documen...

Page 111: ...roduct deficiency or secondary damnification occurred to Buyer from law suit to ULVAC by third party for patent infringement 9 The reason of the failure deemed below the specified usage condition by U...

Page 112: ...n seal For PMB100D FPM 2 Bearing 6203 P5 SUJ 2 O ring AS568 258 FPM 1 Mechanical seal For PMB100D SUS 1 Oil level gauge For PMB100D Polycarbonate 1 O ring G50 1 FPM 1 O ring P9 1 FPM 1 O ring P30 1 FP...

Page 113: ...ring S12 2 FPM 1 Teflon seal VCF30405 FPM 2 Bearing 6205 P5 SUJ 2 O ring AS568 268 FPM 1 Mechanical seal For PMB300D SUS 1 Oil level gauge For PMB300D Polycarbonate 1 O ring G65 1 FPM 1 O ring P9 1 FP...

Page 114: ...FPM 1 O ring S12 2 FPM 1 Teflon seal For PMB600D FPM 2 Bearing 6206 P5 SUJ 2 O ring AS568 276 FPM 1 Mechanical seal For PMB600D SUS 1 Oil level gauge For PMB600D Polycarbonate 1 O ring G75 1 FPM 1 O...

Page 115: ...ring AS568 278 FPM 1 O ring AS568 278 FPM 2 O ring V120 1 FPM 1 O ring P16 1 FPM 1 Mechanical seal For PMB1200D SUS 1 Oil level gauge For PMB1200D Polycarbonate 1 O ring G85 1 FPM 1 O ring P32 1 FPM 1...

Page 116: ...O ring AS568 384 FPM 1 O ring AS568 384 FPM 2 O ring V225 1 FPM 1 O ring P22 1 FPM 1 Mechanical seal For PMB2400D SUS 1 Oil level gauge For PMB2400D Polycarbonate 1 O ring G105 1 FPM 1 O ring V55 1 F...

Page 117: ...ty period Table Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body indicating that content of the hazard...

Page 118: ...ion Remarks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful subs...

Page 119: ......