YK11-0016-DI-002-08
66
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed by the vacuum
pump.
If the Pump was used to exhaust the toxic gas, the Pump oil as well
as the Pump unit shall become toxic. Pay a full attention.
CAUTION
Read “1. 2” previously before starting lubrication.
Please obtain the latest version of Material Safety Data Sheet (SDS)
from our Sales Department.
Weal protective gears such as rubber gloves, protective goggle and
so on.
Should the oil touched to your hand are entered in your eye,
immediately follow the emergency treatment described on the SDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our scope
of guarantee as it might impair the pump performance and shorten
the life cycle.
CAUTION
To lubricate, be sure to stop running the Pump and return the
Mechanical booster inside to the atmospheric pressure.
Chamber containing the oil becomes vacuum during operation.
Taking off the plug during operation would cause a large leak and
give damage to the Pump unit.
Never fail to conduct the lubrication oil out gassing before
starting operation when lubricated a new the Mechanical booster
pump or left it a long time after lubrication.
Starting operation without out gassing might generate a lot of
bubbles and cause them flow in the Rotor chamber.
Summary of Contents for PMB100D
Page 2: ......
Page 3: ...Declaration of Conformity...
Page 39: ...YK11 0016 DI 002 08 12 2 4 Dimensional drawing Fig 11 Dimensional drawing PMB100D...
Page 40: ...YK11 0016 DI 002 08 13 Fig 12 Dimensional drawing PMB300D...
Page 41: ...YK11 0016 DI 002 08 14 Fig 13 Dimensional drawing PMB600D...
Page 42: ...YK11 0016 DI 002 08 15 Fig 14 Dimensional drawing PMB1200D...
Page 43: ...YK11 0016 DI 002 08 16 Fig 15 Dimensional drawing PMB2400D...
Page 62: ...YK11 0016 DI 002 08 35...
Page 65: ...YK11 0016 DI 002 08 38...
Page 72: ...YK11 0016 DI 002 08 45...
Page 84: ...YK11 0016 DI 002 08 57 Fig 28 PMB300D Optional attachment figure...
Page 85: ...YK11 0016 DI 002 08 58 Fig 29 PMB600D Optional attachment figure...
Page 86: ...YK11 0016 DI 002 08 59 Fig 30 PMB1200D Optional attachment figure...
Page 89: ...YK11 0016 DI 002 08 62 Fig 33 Dimensional drawing PMB2400D Horizontal exhaust model...
Page 99: ...YK11 0016 DI 002 08 72...
Page 105: ...YK11 0016 DI 002 08 78...
Page 119: ......
