Ulvac PVD-180, Instruction Manual

Page 1: ...MANUAL OIL SEALED ROTARY VACUUM PUMP PVD 180 PVD 180B PVD 360 PVD 360B Before using this product be sure to read this operation manual Keep this manual with care to use at any time ULVAC Inc Component...

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Page 3: ...16 5 Oil mist trap Option 17 Pump Performance 17 1 Ultimate Pressure 17 2 Pumping Speed 18 3 Power Requirements 19 Maintenance and Check 20 1 Maintenance 20 2 Regular Check 20 2 1 Check and Replace V...

Page 4: ...g 12 Connection with Vacuum System for PVD 180 PVD 360 13 Fig 13 Connection 1 with Vacuum System for PVD 180B PVD 360B 14 Fig 14 Connection 2 with Vacuum System for PVD 180B PVD 360B 14 Fig 15 Connect...

Page 5: ...uches the unit it may get burned 4 This product is not made as the withstand pressure structure Ensured pressure value of the Pump shall be 0 03MPaG 0 3kg cm2G Gauge pressure Do not run the Pump on bl...

Page 6: ...el is put Do not open a panel or a safety cover during operation You should turn off the power line of the moving part If the power of this Pump doesn t supply the moving part may have a possible to m...

Page 7: ...t function according to your application It is applicable to breathe in the condensed gas such as the steam and solution vapor Note Spec H don t have the gas ballast function 2 Oil anti sack backflow...

Page 8: ...Spec H External leak test It is inspected before shipment if helium leak rate from outside to the Pump is less than 10 6 Pa m3 sec helium leak test by hood test method Leak rate will increase due to a...

Page 9: ...ional TMX 1 Options Oil mist trap RF explosion resistant motor Special application Spec K H and Z 1 Measured with a Pirani gauge Approx 6 7X10 2 Pa when measured with a McLeod vacuum gauge 2 The pump...

Page 10: ...SK00 4167 DI 002 07 6 3 Dimensional drawing Fig 2 Dimensional drawing PVD 180 Fig 3 Dimensional drawing PVD 360...

Page 11: ...SK00 4167 DI 002 07 7 Fig 4 Dimensional drawing PVD 180B Fig 5 Dimensional drawing PVD 360B...

Page 12: ...SK00 4167 DI 002 07 8 Fig 6 Dimensional drawing PVD 180 H RF 1 RF 7 Fig 7 Dimensional drawing PVD 360 H RF 3 RF 8...

Page 13: ...SK00 4167 DI 002 07 9 Fig 8 Dimensional drawing PVD 180 H RF 2 Fig 9 Dimensional drawing PVD 360 H RF 5...

Page 14: ...e set the pump horizontally on a rigid floor The PVD pump is almost free from vibration during operation and has no need of anchor bolts in mounting The base of the pump should be however installed re...

Page 15: ...an electromagnetic switch with thermal relay for remote starting Use the safety circuit capacity shown in Table 4 Attention Be sure to use the motor breaker Since a current 5 to 10 times the rated cur...

Page 16: ...andard motors Should you use other motor confirm the specific by the motor nameplate 5 Fit the V belt 6 Connect the solenoid valve B TYPE Applied only for Type PVD 180B or 360B The electrical supply t...

Page 17: ...n the suction port of the pump to prevent larger solids from entering the pump Do not take the wire net off The net should be washed and cleaned periodically according to your specific maintenance sch...

Page 18: ...uipment and the vacuum pump is required for PVD 180 H and PVD 360 H as shown in Fig 16 When the pump stops shut the vacuum valve A to keep the equipment in vacuum then open the leak valve B and let ai...

Page 19: ...contact the closest Service Center 4 When the pump is kept running for several hours the oil temperature in the case will rise to about 70 at a room temperature around 60 65 If the oil temperature ex...

Page 20: ...lve is limited In such a case close the Main valve breathe in the air through the gas ballast valve and idle operate the Pump Then the oil temperature shall rise up and be cleaned by means of the Gas...

Page 21: ...he most favorable condition using new specified pump oil by means of a vacuum gauge installed at the suction pipe of the pump the rest of the vacuum system should be functionally disconnected from the...

Page 22: ...ending on the type and pressure of the sucked gas It shall indicate the maximum exhaust speed in the high pressure range and lower speed little by little lower becomes the pressure PVD 180 H 360 H has...

Page 23: ...e Pump shall indicate the largest load pressure range while the suction pressure was between 2 7 104 4 104 Pa Operation opening the gas ballast valve would require larger motive energy at all the time...

Page 24: ...ltimate pressure is rise leading to poor function of the mechanical friction parts of the Pump In the worst case the Pump will seize up and cannot be rotated The vacuum pump oil will be gradually dete...

Page 25: ...en the life time by overheat The pump is not start or not perform pumping speed Initial wear Early operation the belt tension decreases by the extension and fall in the pulley groove Re tension the be...

Page 26: ...over 3 Set the Ring for Deflection to 5mm 4 Set the Ring for Load to 0N 5 Push the center of the belt between the motor pulley and the pump pulley down 5mm with tension meter 6 Read the load after pus...

Page 27: ...is dirty please wash that Further it is anticipated that any welding scale drops off in the pipe particularly at the beginning of the system start Be fully cautious 2 6 Checking Noise and Abnormal Vib...

Page 28: ...PVD 180 B JIS B 2401 P 22A 1 PVD 360 B JIS B 2401 P 30 1 Solenoid Valve Only PVD 180B 360B CKD AB3X Custom made 1 AL Gasket Only PVD 180B 360B 10 13 t1 5 1 Table 7 PVD 180 H PVD 360 H Main replacemen...

Page 29: ...the power supply 9 Are the Safety circuit such as a MS Magnetic Switch and MCCB Molded Case Circuit Breaker normal Trips Right the cause of trips Reset 10 Are the Safety circuit such as a MS Magnetic...

Page 30: ...b Dust is being suctioned c Solvent vapor is being suctioned d Foreign substance enters in Replace with new oil Conduct the overhaul Inside cleaning a Put the trap into the front stage of the Pump b P...

Page 31: ...on starting or stopping the machine There is no particular problem as it s a phenomenon caused by vanes that temporarily make irregular motions 9 The tension of the belt is loose Replace and Re tensio...

Page 32: ...n substance entered inside the Pump impaired the Motor rotation Conduct the overhaul Removal of foreign substance inside the Pump 2 There is a leak in the pipe connecting with the Pump Use a Leak dete...

Page 33: ...ard specifications although this product is used under the service conditions described in this document such as temperature range and power etc 2 Direct export transaction Product which has damage ca...

Page 34: ...AC for patent infringement 9 ULVAC engineer decided the reason of failure was improper use which does not conform to the use condition of this Product 10 Consumable parts refer to 9 Main Displacement...

Page 35: ...ty period Table 9 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body indicating that content of the haza...

Page 36: ...ion Remarks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful subs...

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