ULVAC CRYOGENICS INCORPORATED
17
4. Installation
4.1 Conditions for Installation
Ambient Temperature
The room temperature must be between 4
°C
to 38
°C
. Maximum humidity is 88%.
Helium Supply System
A helium supply system is necessary to purify the helium gas or to compensate for helium that
has leaked from t
he compressor unit.
For the helium supply system, a helium bottle (99.999% purity or above), pressure regulator,
exit valve, and a charge hose or similar supply line, are needed.
Power Source
Make sure that the correct AC power source is supplied to the compressor.
For more information, see ‘Table 3-1 Compressor Unit SA115-C Specifications.’
Room Temperature
Check that the room temperature of the site meet the specifications shown in table3-1.
Use air conditioners that have sufficient performance to the heat load of the equipment.
Keep the room temperature as shown in table 3-1.
Earthquake Proof measures
Fix the compressor unit with anchor bolts as required.
Maintenance Area
Keep clear the space for maintenance works around the compressor unit; 400mm in front,
600mm in rear, and 200mm on the right, left and top.
Summary of Contents for SA115-C
Page 2: ......
Page 6: ...IV ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 16: ...10 ULVAC CRYOGENICS INCORPORATED Figure 3 4 SA115 C Internal Components 9 8 17 19 20 24 16...
Page 18: ...12 ULVAC CRYOGENICS INCORPORATED Figure 3 5 SA115 C Internal Components 7...
Page 42: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 44: ...R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
