Ulvac SGT-100, Instruction Manual

For safe operation 

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Please read this instruction manual very carefully before using SGT – 

①

Before using SGT-100,200 please read this 

『For safe operation』  and use it carefully. 

②

Ensure to observe the safe operation, preventing from the personal damage or damage to 
the equipment. 

③

These signal words as shown in below indicates the damage differ in degree if not strictly 
observed. 

 Danger 

This note indicates a potentially hazardous situation which if not 
strictly observed, could result in injury or damage the equipment. 

 Warning 

This note indicates a potentially hazardous situation which if not 
strictly observed, could result in severe personal injury. 

 Caution 

This note indicates a potentially hazardous situation, which if not 
strictly observed, could result in slight injury or damage to the 
equipment. 

④

The safety remainder is indicated as shown below. 

This note indicates a 

『

Prohibited

』

 sign. 

This note indicates a 

『

Compulsory

』

  that should do. 

⑤

『

The safety reminder

』

  indicates 3items as shown below. 

      How to operate SGT-100,200 and element (in common usage) 
   How to operate SGT-100,200 
   How to handle the element 
 
 
 
 
 

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