SK00-9662-EI-103-00
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2.
Handling precautions
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CAUTION
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Please check this chapter before you start using this unit.
2.1.
Precautions on operating environment
Usage environment
Use this unit within the environment specified in the specifications.
Usage environment
Do not use it in a place where this unit is exposed to water or where the humidity
is high and condensation occurs. If water gets inside thid unit, it may cause a
malfunction, electric leakage, or fire.
Ensuring ventilation
Do not put this unit in a closed container, and be sure to install it in a well-
ventilated place. If sealed, the temperature of the electronic components inside the
power supply will rise, which may shorten the service life.
Excessive pressure in the vacuum chamber
Do not connect to a place where the pressure inside the sensor exceeds atmospheric
pressure. It may cause harm to the surroundings including the human body, such as
damage to the sensor or popping out of the sensor from the connection. When the
pressure exceeds the atmospheric pressure, install an isolation valve so that the
pressure inside the sensor does not exceed the atmospheric pressure.
Use in a corrosive gas atmosphere
When exposed to corrosive gas or chemically active gas such as halogen or halogen-
based gas, problems such as disconnection of filaments and changes in pressure
characteristics occur. When using in such an environment, install an isolation valve
between this unit and the vacuum chamber to protect it from exposure to these gases
as much as possible.
Use in a CVD gas atmosphere, etc.
When exposed to CVD (Chemical Vapor Deposition) raw material gas or gas that
accumulates such as oil mist of rotary pumps, problems such as disconnection of
filaments and changes in pressure characteristics occur. When using in such an
environment, install an isolation valve between this unit and the vacuum chamber to
protect it from exposure to these gases.
Moisture and deposits
If there are many deposits such as water and organic matters that gradually evaporate
in the sensor, it will affect the pressure accuracy and response speed on the vacuum
side in particular. Please consider the installation location and method so that
deposits do not adhere.
Influence of magnetic field
Due to the influence of a magnetic field of 0.01T (100Gauss), the pressure indication
on the atmospheric pressure side is affected by about 10%. If this unit is affected
by a magnetic field, install a magnetic shield.
Summary of Contents for SWU10-U
Page 6: ...SK00 9662 EI 103 00 VI Revision history Date Number Reason 2022 12 14 00 First edition...
Page 34: ...SK00 9662 EI 103 00 27 9 EC DECLARATION OF CONFORMITY...
Page 35: ...SK00 9662 EI 103 00 28 10 UK DECLARATION OF CONFORMITY...
Page 36: ...SK00 9662 EI 103 00 29 11 Certificate of decontamination...
Page 37: ...SK00 9662 EI 103 00 30 12 Drawings 12 1 SWU10 U dimensions...
Page 38: ...SK00 9662 EI 103 00 31 12 2 SWU10 U dimensions...
