SK00-9662-EI-103-00
II
Before using this product
Thank you for purchasing our product.
When you receive this product, first check that it is the same as your order and that
it is not damaged by transportation.
In order to use this product for a long time, please be sure to read this instruction
manual before installing, operating, inspecting, or servicing this product, and
matters related to safety precautions, specifications and operation methods of this
product. Please fully understand.
The copyright of the instruction manual belongs to ULVAC, Inc.
It is prohibited to copy any part of the instruction manual without our consent.
In addition, it is prohibited to disclose or transfer the instruction manual to a
third party without the written consent of our company.
Please note that the contents of the instruction manual are subject to change or
revision without notice due to changes in product specifications or product
improvements.
Saftety symbol marks
The warning display in this instruction manual contains a symbol mark for safety so
that you can understand the matters to be observed. The words used for the symbol mark
are used properly as follows.
*
WARNING
*
Failure to follow this warning indicates a dangerous situation that
could result in death or serious injury.
Work that ignores this warning part may cause serious damage to the
life of the worker or factory equipment (including this product).
*
CAUTION
*
Indicates a risk situation that could result in minor or moderate
injury if this caution is not followed.
If you ignore this caution, you may cause minor injuries to the
operator, or you may break the equipment or make adjustments.
Note
Although there is no direct danger, it describes what you need to know
for the safety of the operator or for the correct and safe use of the
device.
Summary of Contents for SWU10-U
Page 6: ...SK00 9662 EI 103 00 VI Revision history Date Number Reason 2022 12 14 00 First edition...
Page 34: ...SK00 9662 EI 103 00 27 9 EC DECLARATION OF CONFORMITY...
Page 35: ...SK00 9662 EI 103 00 28 10 UK DECLARATION OF CONFORMITY...
Page 36: ...SK00 9662 EI 103 00 29 11 Certificate of decontamination...
Page 37: ...SK00 9662 EI 103 00 30 12 Drawings 12 1 SWU10 U dimensions...
Page 38: ...SK00 9662 EI 103 00 31 12 2 SWU10 U dimensions...
