SK00-9662-EI-103-00
22
7.
Technical report
7.1.
Gas specie/humidity dependence
Since this unit is a Pirani vacuum gauge, the pressure indication differs depending
on the soecies and humidity of the gas being measured based on its measurement
principle.
Fig. 7-1 Gas species dependence (adjusted by N
2
)
Fig. 7-2 Gas species dependence (adjusted by dry air)
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
1.0E+04
1.0E+05
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
1.0E+04
1.0E+05
REFEENCE PRESSURE (Pa)
PRESSURE (Pa)
He
DRY Air
Ar
1.0E-02
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
1.0E+04
1.0E+05
1.0E-02
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
1.0E+04
1.0E+05
REFERENCE PRESSURE (Pa)
PRESSURE (Pa)
-100
-80
-60
-40
-20
0
20
40
60
80
100
ERROR (%)
DRY Air
N2
Summary of Contents for SWU10-U
Page 6: ...SK00 9662 EI 103 00 VI Revision history Date Number Reason 2022 12 14 00 First edition...
Page 34: ...SK00 9662 EI 103 00 27 9 EC DECLARATION OF CONFORMITY...
Page 35: ...SK00 9662 EI 103 00 28 10 UK DECLARATION OF CONFORMITY...
Page 36: ...SK00 9662 EI 103 00 29 11 Certificate of decontamination...
Page 37: ...SK00 9662 EI 103 00 30 12 Drawings 12 1 SWU10 U dimensions...
Page 38: ...SK00 9662 EI 103 00 31 12 2 SWU10 U dimensions...