SK00-9662-EI-103-00
IV
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WARNING
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Disassembly prohibited
Do not disassemble this unit. It may cause a fire or electric shock.
If disassembled, the operation cannot be guaranteed. For SWU10-U,
attaching and detaching the sensor is also disassembly.
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WARNING
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No modification
Do not modify this unit. It may cause a fire or electric shock. If
you modify it, we cannot guarantee its operation.
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WARNING
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Usage environment
Use this instrument within the environment specified in the
specifications.
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WARNING
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Usage environment (condensation, humidity, temperature)
Do not use it in a place where this unit is exposed to water or where
the humidity is high and condensation occurs. If water gets inside
this unit, it may cause a malfunction, electric leakage, or fire.
Also, using it outside the specified temperature range may cause a
malfunction or fire.
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CAUTION
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Precautions when laying cables
When laying a communication transmission line in a device, make sure
that the wiring is not close to or parallel to the power line, power
line, high voltage line, high frequency line, etc. It may cause a
malfunction.
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CAUTION
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Ensuring ventilation
Do not put the instrument in a closed container, and be sure to
install it in a well-ventilated place. If sealed, the temperature of
the electronic components inside the power supply will rise, which may
shorten the service life.
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CAUTION
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Usage environment
When exposed to chemically active gas such as halogens and halogen-
based gases, problems such as disconnection of filaments and changes
in pressure characteristics occur. When using in such an environment,
install an isolation valve between this unit and the vacuum chamber to
protect it from exposure to these gases as much as possible.
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CAUTION
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Usage environment
When exposed to accumulated gas such as rotary pump oil mist and CVD
(Chemical Vapor Deposition) raw material gas, problems such as
disconnection of filaments and changes in pressure characteristics
occur. When using in such an environment, install an isolation valve
between this unit and the vacuum chamber, and seal the isolation valve
so that it is not exposed to these gases as much as possible.
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CAUTION
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Moisture and deposits
If there are many deposits that gradually evaporate, such as water
and organic matter, in the sensor, it will affect the pressure
accuracy and response speed on the zero point side. Please consider
the installation location and method so that deposits do not adhere.
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CAUTION
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Influence of magnetic field
Due to the influence of a magnetic field of 0.01T (100G), the
pressure indication on the atmospheric pressure side is affected by
about 10%. If this unit is affected by a magnetic field, install a
magnetic shield.
Summary of Contents for SWU10-U
Page 6: ...SK00 9662 EI 103 00 VI Revision history Date Number Reason 2022 12 14 00 First edition...
Page 34: ...SK00 9662 EI 103 00 27 9 EC DECLARATION OF CONFORMITY...
Page 35: ...SK00 9662 EI 103 00 28 10 UK DECLARATION OF CONFORMITY...
Page 36: ...SK00 9662 EI 103 00 29 11 Certificate of decontamination...
Page 37: ...SK00 9662 EI 103 00 30 12 Drawings 12 1 SWU10 U dimensions...
Page 38: ...SK00 9662 EI 103 00 31 12 2 SWU10 U dimensions...
