Ulvac SWU10-U, Instruction Manual

SK00-9662-EI-103-00 

5 

Temperature fluctuation 

According to the measurement principle of pirani vacuum gauge, the ambient temperature 

of the sensor affects the measured value. Pay attention to the mounting position so 
that the ambient temperature does not deviate significantly from the temperature at 
the time of calibration (about 25

℃

). 

Influence of electrons, ions, etc. 

If there is a strong source of electrons or ions nearby, not only will the correct 

pressure not be measured, but it may also cause damage or malfunction of this unit. 
Please be careful about the mounting position so that it will not be affected by 

electrons or ions. 

Foreign matter intrusion 

Protect the inside of this unit from the opening to prevent foreign matter such as 

metals and flammable materials from entering. 

Impact 

Do not give a shock to this unit. The impact may cause the filament to disconnection, 

the sensor to leak, or the mounting part to be damaged. 

2.2.

Precautions on power supply 

Precautions when laying cables 

Make sure that the connection cable to each pin does not come into contact with other 

pins or cases. Also, be careful not to make a mistake in the pin sign. Incorrect 
connection may cause damage to this unit and the devices connected to this unit, or 
cause a fire. 

Power supply voltage 

Before turning on the power, check that the working voltage of this unit and the power 

supply are correct. Connecting the wrong power supply may damage this unit and the 
devices connected to this unit, or cause a fire. In particular, do not apply a voltage 

exceeding DC 30V. 

Power on 

Turn on the power after connecting all the sensor, display, evaluation unit, cable, 

etc. to this unit. Doing so may damage this unit or the equipment connected to this 

unit or cause a fire. In addition, the filament of the sensor may be disconnected. 

 
 
2.3.

Precautions on installation of this unit 

Protective ground 

Be sure to electrically connect this unit to a grounded vacuum chamber. Use a 

conductive metal clamp for the NW flange. If it is not grounded properly, not only 

will it not show the correct pressure, but it may also damage this unit and the 
equipment connected to it, or cause a fire. When insulating from the vacuum chamber, 
ground the case part (D-sub connector shell part) to D type (3types).