SK00-9662-EI-103-00
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7.3.
Scheduled adjustment
There are various environments such as when the ambient temperature fluctuates greatly
or when a lot of dirt such as oil adheres, so it is up to the customer to decide how
often the adjustment should be made.
Tests at ULVAC showed that the same accuracy as that at the start of operation can be
maintained by conducting adjustment about once a month under the following conditions.
That is, this unit is installed directly above the GVD-135A rotary pump, repeating
venting to atmospheric pressure and evacuation at a cycle of 20seconds, and making
adjustment indoors (at room temperature).
Summary of Contents for SWU10-U
Page 6: ...SK00 9662 EI 103 00 VI Revision history Date Number Reason 2022 12 14 00 First edition...
Page 34: ...SK00 9662 EI 103 00 27 9 EC DECLARATION OF CONFORMITY...
Page 35: ...SK00 9662 EI 103 00 28 10 UK DECLARATION OF CONFORMITY...
Page 36: ...SK00 9662 EI 103 00 29 11 Certificate of decontamination...
Page 37: ...SK00 9662 EI 103 00 30 12 Drawings 12 1 SWU10 U dimensions...
Page 38: ...SK00 9662 EI 103 00 31 12 2 SWU10 U dimensions...
