ULVAC CRYOGENICS INCORPORATED
R-1
Revision History
Date
Revision
No.
Contents
2016 / 08 / 08
2016 / 09 / 13
2017 / 09 / 27
2019 / 09 / 24
2022 / 01 / 18
2016.08
2016SR01
2017SR02
2019SR03
2022JA04
First edition
“Disposal Considerations” has been added.
6.3.2 N2 ALARM
Figure 6-5 and Table 6-4 have been modified.
Full-fledged revision
12. Maintenance and Inspection has been modified.
Summary of Contents for UMP-40W
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