xi
Table of contents
Introduction
Copyrights and Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i
Precautions for Safe Operation . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . .ii
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Operating Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v
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Explanation of Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
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Location of Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . vii
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Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii
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Part Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii
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Air Cooled Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .ix
Table of contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . .. . xi
Section 1 OUTLINE AND DESCRIPTIONS
1.1
Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .2
1.2
Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .3
1.2.1
Outside Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . .3
1.2.2
Standard Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . .7
Section 2 IDENTIFICATION AND FUNCTION
2.1
Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .10
Summary of Contents for UTM-MS Series
Page 2: ...No Text...
Page 9: ...vii Introduction Location of Label...
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Page 25: ...2 1 Pump Main Unit IDENTIFICATION AND FUNCTION...
Page 27: ...3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping CONSTRUCTION AND PRINCIPLE...
Page 31: ...4 1 Standard Specifications for Pump Unit SPECIFICATIONS...
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Page 51: ...GAS PURGE...
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Page 59: ...9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration TROUBLESHOOTING...
