41
8.5
Turbo Molecular Pump Return Request
When pump is removed from a equipment, drain the water from water pipe. If remained water
leak from water pipe, pump body will be corroded.
After the water drained, shut water pipe by the cap which is attached at shipment.
Remove the pump in the manner shown in Fig. 8-1.
Fig. 8-1
Way to Remove the Pump
When the pump is returned, please pack it surely so as not to damage it by the impact, the
vibration, and the high temperature and humidity environment, etc. from the outside.
Please use the packing materials which were used at shipment from ULVAC KIKO, or use the
packing materials having a same quality or better.
CAUTION
CAUTION
Summary of Contents for UTM-MS Series
Page 2: ...No Text...
Page 9: ...vii Introduction Location of Label...
Page 12: ...x No Text...
Page 16: ...xiv No Text...
Page 24: ...8 No Text...
Page 25: ...2 1 Pump Main Unit IDENTIFICATION AND FUNCTION...
Page 27: ...3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping CONSTRUCTION AND PRINCIPLE...
Page 31: ...4 1 Standard Specifications for Pump Unit SPECIFICATIONS...
Page 34: ...18 No Text...
Page 50: ...34 No Text...
Page 51: ...GAS PURGE...
Page 58: ...42 No Text...
Page 59: ...9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration TROUBLESHOOTING...
