YK15-0009-DI-002-04
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5.2.3 Replace Vacuum Pump Oil
Proceed as follows.
(1) Shut down the Pump and open the drain port to drain the oil in the Lubrication chamber.
Upon completion of draining the oil, close the drain port again and run the Pump under no load
for approx. 5 seconds to drain the oil adhered to the Pump parts.
(2) Close the drain port and fill fresh oil through the oil filling port. (Refer to Fig.14)
Fresh oil until the oil level comes the upper line of the oil level gauge.
(3) If the oil is severely contaminated, fill fresh oil and run the Pump for several minutes under no
load to clean the Pump interior. Repeat this operation several times depending on the degree
of oil contamination.
(4) After changing the oil with fresh oil, run the Pump to warm it up and then check the ultimate
pressure.
(5) If the specified ultimate pressure cannot be attained by oil change, sludge or other deposit
may have collected on the bottom of the Pump case. In that event, overhaul is required.
Contact your local ULVAC organization or representative.
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed by the vacuum pump.
If the Pump was used to exhaust the toxic gas, the Pump oil as well as
the Pump unit shall become toxic. Pay a full attention.
CAUTION
①
Read “1. 2 Chemical Material Safety Data Sheet” previously before
starting lubrication.
Please obtain the latest version of Safety Data Sheet (SDS) from our
Sales Department.
②
Weal protective gears such as rubber gloves, protective goggle and
so on.
Should the oil touched to your hand are entered in your eye,
immediately follow the emergency treatment described on the SDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC. Operation
using oil other than designated shall be out of our scope of guarantee
as it might impair the Pump performance and shorten the life cycle.
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