17
3. Using the exhaust system
3-3 Shutting down
Exhaust system shut down
1) Vacuum evacuation to retain vacuum inside the bell jar
2) If using an ionization vacuum gauge, filament
OFF
3) Main valve
Completely closed
4) DP
OFF
5) FAN
ON
6) Wait 15 minutes
・
cooling water
OFF
・
Three-way valve
CLOSE
・
RP VENT
Open
・
RP1, RP2
OFF
7) 90 minutes later, FAN automatically switches OFF
* 8) Main breaker
OFF
* 9) Your breaker
OFF
*Steps (8) and (9) should be performed when possible. Usually
the procedure is complete at the end of step (6).
4. Using the evaporator
4-1 Opening the bell jar
1) If using an ionization vacuum gauge filament
OFF
2) Main valve
Completely closed
3) Three-way valve FORE
Check
4) Bell Jar Vent
Gradually open
Note
Using dry air or nitrogen gas can prevent the inside of the bell jar from being
contaminated when opening it.
Opening the bell jar can contaminate its interior with moisture from the
atmosphere.
Connecting the bell jar vent tube
Joint specifications:
1/4 synflex joint
Connector tube:
1/4 synflex tube