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6. Handling Emergencies
6-1 Temporary power failure
All machinery will automatically return to its state prior to the power failure.
6-2 Prolonged power failure
1) Main valve
Immediately
Completely close
2) Three-way valve
CLOSE
3) RP VENT
Open
4) All switches on the operation panel
OFF
5) One hour later, turn off the cooling water
6-3 When power is restored
Please refer to the following subsections of Section 3, Using the Exhaust System
3-1 Preparation
3-2 Operation
6-4 Water supply temporarily cut off
All machinery will automatically return to its state prior to the cutoff.
6-5 Water supply cut off for a prolonged period
Stop the device
1) If using an ionization vacuum gauge filament
OFF
2) Main valve
Completely close
3) DP
OFF
4) FAN
ON
5) 90 minutes later
・
Three-way valve
CLOSE
・
RP VENT
Open
・
RP1, RP2
OFF
・
FAN
Automatically switches off
* 6) Main breaker
OFF
* 7) Your breaker
OFF
*Steps (6) and (7) should be performed when possible. Usually the
procedure is complete at the end of step (5).
6-6 When the water supply is restored
Please refer to the following subsections of Section 3, Using the Exhaust System
3-1 Preparation
3-2 Operation