DE35-ST Operating Instructions
D292469I
135
DES X-Y Stage
2336
Spring, eject head position adjustment
2
1024
Pneumatic ejector diaphragm
5
2310
Pneumatic ejector diaphragm spring
6
14305
AUM motorized ejector drive belt
1
Wafer Holder
16158
Replacement Destaco wafer holder clamp
1
Long Term Spare Parts
These items are not expected to require replacement for several years, however due to
the high speed of technological change; these parts may be obsolete or otherwise
unavailable when required.
PART
NUMBER
DESCRIPTION
SUGGESTED QUANTITY
Mainframe
15007
Modified PCB, Keyboard Interface
1
1434
Small Step Driver PCB
1
15683
Replacement Large Step Driver
1
26145
Limit Switch CBL Left & Right Side
1
25132
Replacement Circuit Board Assembly, CPU
and I/O PCB’s
1
25330
Solenoid Driver PCB
1
Summary of Contents for Royce DE35-ST
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