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Contents
Safety information! ............................................................. 9
Important information! ......................................................................... 9
General information ............................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions ............................................................................ 14
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 17
Maintenance and repair..................................................................... 19
Important information: Equipment marking (ATEX) ..................... 21
Technical data ................................................................... 23
General technical data valid for all pumps ........................................ 23
Gas inlet temperatures ..................................................................... 25
Use and operation ............................................................ 28
Installing a pump in a vacuum system .............................................. 28
During operation ................................................................................ 29
Important notes regarding the use of gas ballast .............................. 31
Shutdown & storage .......................................................................... 32
Accessories ...................................................................... 33
Troubleshooting ............................................................... 35
Replacing diaphragms and valves.................................. 37
Cleaning and inspecting the pump heads ........................................ 40
Replacing the diaphragm ................................................................. 41
Assembling the pump heads ............................................................ 43
Replacing the valve at the distributor (outlet side) ........................... 45
Assembling the connecting hoses .................................................... 46
Repair - Maintenance - Return - Calibration ................... 47
Warranty ............................................................................ 49
Health and safety clearance form ................................... 50
EC Declaration of Conformity of the Machinery ............... 51
China RoHS ....................................................................... 52
Summary of Contents for ME 16C
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