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Models 947, 948 and 960 Leak Detectors Operations and Service Manual
Section 4. Maintenance
Like other sensitive test equipment, a mass spectrometer leak detector requires periodic
maintenance to ensure continued reliable operation. After prolonged use, the leak detector
accumulates contaminants from even the cleanest of products tested. These contaminants
eventually impair operation. A thorough disassembly and cleaning of the entire vacuum
system, which includes the cal leak valve block and spectrometer tube, restores normal
operation. For heavy production use, more frequent overhauls are needed. In most cases,
this work is done by user maintenance personnel, but it may also be done by Varian
Vacuum Technologies under the terms of a service contract.
This maintenance section does not cover overhaul of the entire vacuum system. It does
cover daily maintenance and as-required maintenance.
Important Reminders
Heed the following notes, cautions, and warnings when performing maintenance.
WARNING
Disconnect power from the 947/948/960 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
WARNING
The mechanical components of leak detectors are typically
cleaned with alcohol or other solvents. When heated, sprayed,
or exposed to high-temperature equipment, these solvents
become flammable and explosive, causing serious injury or
death. Do not use near a high-temperature source. Ventilate
the work area with a blower and use solvents only in large,
well-ventilated rooms.
Alcohol and other solvents are irritants, narcotics, depressants,
and/or carcinogens. Their inhalation and/or ingestion may
produce serious effects. Prolonged or continued contact with
the skin results in absorption through the skin and moderate
toxicity. Always ensure that cleaning operations are carried out
in large, well-ventilated rooms. Wear eyeshades, gloves, and
protective clothing.
WARNING
The preamplifier is a static sensitive device. Wear a grounding
device while the preamplifier is being handled.
Summary of Contents for 948
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