Varian 948, Operation And Service Manual

Page 1: ...vacuum technologies OPERATION AND SERVICE MANUAL Models 947 948 and 960 Leak Detectors Part No 699909947 Revision H March 2003...

Page 2: ...ow MacroTorr TriScroll and ConvecTorr are trademarks or registered trademarks of Varian Vacuum Technologies Apiezon is a registered trademark of M I Materials Ltd Alconox is a registered trademark of...

Page 3: ...Introduction to Models 947 948 and 960 Leak Detectors 1 1 1 1 Platform Electronics 1 4 1 2 Unpacking the 947 948 960 1 4 1 2 1 Unpacking Instructions 1 4 1 2 2 Removing the 947 948 960 from the Skid...

Page 4: ...tup 3 3 3 2 1 Parameters and Operating Modes 3 3 3 3 Start Up 3 8 3 3 1 Startup Procedure 3 10 3 4 Calibration and Sensitivity Checks 3 11 3 4 1 Calibration and Sensitivity Checks 3 12 3 5 Operating P...

Page 5: ...2 Calibration 4 27 4 2 7 4 1 Vacuum Low Pressure Calibration 4 27 4 2 7 4 2 Atmospheric Calibration 4 28 4 2 7 5 Test Port Pressure Gauge TC1 Calibration 4 29 4 2 7 6 Vacuum Low Pressure Calibration 4...

Page 6: ...he Dry System Rough Pump B 21 B 4 2 2 1 Examining and Cleaning Centering Rings O rings and Manifold B 21 B 4 2 2 2 Re installing the Dry System Rough Pump B 21 B 5 Replacing the Forepump B 22 B 5 1 We...

Page 7: ...pendix E 947 948 Specifications E 1 Appendix F Accessories F 1 Appendix G Leak Detection Theory G 1 G 1 Leak Testing Why is it Needed G 1 G 2 Classes of Leak Detection G 1 G 3 Terminology G 2 G 4 Vari...

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Page 9: ...ectrometer Tube Removal 4 13 4 3 Spectrometer Tube Disassembly 4 15 4 4 Spectrometer Tube Reassembly 4 16 4 5 Spectrometer Tube Reassembly Ground Slit Plate 4 17 4 6 Spectrometer Tube Reassembly Magne...

Page 10: ...d and Exhaust Connections B 16 B 12 Rough Pump Manifold and Exhaust Connections B 18 G 1 Test Piece Evacuated Tracer Probe Used to Locate Leak G 6 G 2 Test Piece Evacuated and Hooded with Helium Atmos...

Page 11: ...Error Condition Codes 5 2 5 2 Troubleshooting 5 3 C 1 Internal Operating Parameters C 2 C 2 Non volatile Operating Parameters C 5 C 3 Spectrometer Operating Parameters C 6 C 4 Command Parameters for...

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Page 13: ...en oder Richtlinie n bereinstimmt auquel se r f re cette d claration est conforme la auz norme s ou au x document s normatif s al que se refiere esta declaraci n es conforme a la s norma s u otro s do...

Page 14: ...person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer o...

Page 15: ...ay be verified as required The data recorded below includes readings taken during the final test prior to shipment They are convenient for reference purposes if tuning adjustments are altered Slight c...

Page 16: ...ll hazards associated with this equipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of unskilled improper or careless o...

Page 17: ...a large well ventilated room Alcohol methanol or other solvents are irritants narcotics depressants and or carcinogens Their inhalation and or ingestion may produce serious side effects Prolonged or c...

Page 18: ...responsibility to maintain the level of tightness particularly when pumping dangerous products CAUTION The performance and operating safety of this equipment can be guaranteed only if it is operated a...

Page 19: ...ges Always disconnect the power cord and any interface cables before opening the enclosure Do not touch the power inlet s contacts for at least 10 seconds after disconnecting the power cord CAUTION Th...

Page 20: ...es Part No 695400004 is recommended O ring Care When removing checking or replacing O rings keep in mind the following NOTE Varian Vacuum Technologies recommends replacing all O rings during routine m...

Page 21: ...by the high vacuum pump Service of the spectrometer tube requires that this vacuum be vented to the atmosphere CAUTION Do not use grease or other substance on O rings that will come in contact with t...

Page 22: ...ils Rebuilt spectrometer tubes are available on an exchange basis NIST traceable calibrated leak testing and verification services Contacting Varian Vacuum Technologies In the United States you can co...

Page 23: ...n is listed at the start of this book This information should be read before operating the equipment The 947 948 960 has rugged metal enclosures that are mounted on casters for greater mobility A key...

Page 24: ...the turret and operational buttons identified in Figure 1 1 follow the figure Models 948 960 are shown in Figure 1 2 Figure 1 1 947 Leak Detector Turret Enclosure for Service Pendant and electronics...

Page 25: ...60 provides access to the nitrogen cold trap Descriptions of the turret operational buttons and nitrogen trap identified in Figure 1 2 follow the figure Figure 1 2 948 960 Leak Detector Turret Enclosu...

Page 26: ...2 Unpacking the 947 948 960 When receiving the 947 948 960 the following pieces are included Models 947 948 960 leak detector Service Pendant Power cable 115 VAC or 230 VAC Pump manuals for the purch...

Page 27: ...handling The 947 948 960 is heavy and can cause personal injury if not handled carefully when removing it from the skid Method 1 1 With the assistance of a helper carefully roll the leak detector towa...

Page 28: ...l Controls and Indicators The front panel controls and indicators are identified by number in Figure 1 3 Descriptions of each numbered item follow Figure 1 3 Figure 1 3 Front Panel Controls and Indica...

Page 29: ...ates 0 0 and is on at all times 11 Leak Rate Over Indicator Goes on when the upper limits of the Leak Rate scale have been exceeded 12 Auto Man Mode Switch Selects automatic ranging or manual ranging...

Page 30: ...he 947 948 960 Error codes and solutions The leak detector s standard leak setting as measured at the factory Figure 1 4 Turret Door Instruction Label 18 Auto Cal Button Press to initiate automatic ca...

Page 31: ...e figure Figure 1 5 Rear Power Panel Rear panel power and circuit breakers Power Inlet 115 VAC or 230 VAC power connection see Power on page 1 11 Power Switch Circuit Breaker Mains power and Circuit b...

Page 32: ...ret and connects to the 947 948 960 using a six foot cable that connects to an RS 232 serial port J1 a 9 pin D sub connector located inside the lockable turret The service pendant is used to monitor a...

Page 33: ...0 leak detector against unidirectional transients caused by the following phenomena Switching phenomena in the power network e g switching of capacitor banks Faults in the power network Indirect light...

Page 34: ...leak detector includes detailed instructions 1 7 4 Special Installation Requirements Additional services recommended for clean room use include Roughing foreline pump exhaust hose Vent to the outside...

Page 35: ...nnection panel of the 947 948 960 Descriptions of the rear panel connectors follow the figure Figure 1 7 Rear Panel Interface Connectors The ports available on the rear panel for connection are J122 R...

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Page 37: ...8 960 into a production line or for use as automated equipment rather than stand alone equipment 2 1 Physical Considerations An integrated 947 948 960 has the same physical considerations as a manuall...

Page 38: ...ers in black circles The key parts are identified below the figure The valve numbers are used in Table 2 1 The valve name and type are defined in the upper portion of the table the state of each valve...

Page 39: ...ns are used in Table 2 1 Refer to Figure 2 2 on page 2 4 for valve locations V Vacuum S Solenoid O Open C Closed All valves are normally closed Table 2 1 Valve Operation Valve Name Rough Rough Valve O...

Page 40: ...ignate the location of valves Other key parts of the vacuum system represented by numbers in black circles are identified after Figure 2 2 Figure 2 2 948 Flow Diagram Thermocouple Gauge TC2 Thermocoup...

Page 41: ...represented by numbers in black circles are identified after Figure 2 3 Figure 2 3 960 Flow Diagram Reservoir Thermocouple Gauge TC1 Rough Valve Turbo Diffusion Pump Thermocouple TC2 Test Valve Forepu...

Page 42: ...than reject set point 3 Stop 200 msec high pulse Unit goes to vent mode 4 Start 200 msec high pulse Goes to fine test via rough gross modes 6 Parallel Enable Active High Enables rear panel PLC Interfa...

Page 43: ...ak Rate 5 LSD C Active High BCD Leak Rate 6 LSD D Active High BCD Leak Rate 7 MSD A Active High BCD Leak Rate 8 MSD B Active High BCD Leak Rate 9 MSD C Active High BCD Leak Rate 10 MSD D Active High B...

Page 44: ...out the connection J123 connections are referenced to the chassis ground and are not isolated Electrical characteristics comply with EIA TIA Standard EIA TIA 232 E Table 2 4 J123 Pinout Summary Pin on...

Page 45: ...he 947 948 960 Platform J123 female 25 pin connector Discrete I O port for PLC control J120 female 37 pin D connector Discrete BCD and analog leak rate output port for PLC control J121 female 25 pin D...

Page 46: ...stem is assembled and tested Other parameters are changed when a gauge is changed or when the ion source or preamplifier is changed Some parameters are changed automatically during power up or when fu...

Page 47: ...Opto isolated with the negative side of the inputs combined and tied to the return pins of the associated connector The input voltage range is 5 VDC to 24 VDC The maximum input current at 24 VDC drawn...

Page 48: ...ient operation Once PARALLEL ENABLE is asserted operations can be monitored using the host serial port but most parameter values cannot be changed If a command is issued that is not allowed once PARAL...

Page 49: ...obtain accurate readings Operate the 947 948 960 to obtain precision leak readings using helium Put the 947 948 960 in STANDBY mode and or shut it down entirely for maintenance or storage Parameter se...

Page 50: ...Illuminates when the reject function is on and when the leak rate reading exceeds the selected set point Goes off when the leak rate falls below the set point HOLD Illuminates if the machine is in the...

Page 51: ...erating Modes The parameters and operating modes work together to perform leak detection and the parameters that are entered determine the type of test and sensitivity of testing performed The discuss...

Page 52: ...al port or optional discrete I O CALIBRATED LEAK VALUE The 947 948 960 is shipped from the factory with a calibrated leak Its value is noted on the turret of the leak detector and on the Cal Leak Cert...

Page 53: ...INEAR VS LOG OUTPUT Configure the analog output voltage to the optional I O port on the back of the unit The options for output are linear or logarithmic at 2 VDC per decade or 3 VDC per decade AUTO S...

Page 54: ...displayed and held at the analog output communications port until the next test cycle is initi ated This allows the end user to record the actual leak rate value for each test object ROUGH TIME The RO...

Page 55: ...pressure with reduced sensitivity When TRANSFER TO FINE TEST is set to NO the leak detector does not transfer into FINE TEST mode This feature is useful for qualifying parts that have an unusually hi...

Page 56: ...s appropriate to the unit under test Helium tank with spray gun or hook up for auto test Helium for the 948 960 Figure 3 2 shows the important 947 948 960 operation controls for start up and power For...

Page 57: ...test pieces can be removed or attached to the detector Press and hold for 1 second to engage NOTE If the VENT button is pressed for less than one second the leak detector moves to HOLD Test Port The u...

Page 58: ...rom thawing in the vacuum system The trap needs to be filled approximately every 14 hours Monitor the level and fill more often if necessary CAUTION If the cold trap in the 948 960 is allowed to empty...

Page 59: ...s service c2 Rough pump is off Turn on the rough pump c4 No emission Select the other ion source filament Replace ion source if necessary Refer to Section 4 Maintenance on page 4 1 c5 Auto calibrate f...

Page 60: ...s The TEST LED illuminates when test pressure drops The START LED goes off 1 second after TEST LED illuminates The Leak Rate range display goes to most sensitive range 6 Press the ZERO button The ZERO...

Page 61: ...ent Calibration is complete when the AUTO CAL LED goes out 10 Recheck STD LEAK reading Steps 7 and 8 11 Press either the START or VENT button to continue operation following the AUTO CAL routine 3 5 O...

Page 62: ...AN MODE switch in the Leak Rate Range section Figure 3 4 Location of AUTO MAN MODE Switch 3 Press the START button The VENT LED goes off and one second later the START LED illuminates The TEST LED ill...

Page 63: ...the MAN position of the AUTO MAN MODE switch in the Leak Rate Range section 3 Press the SMALLER or LARGER button to select the exponent of the leak rate range to which you want to test 4 Securely atta...

Page 64: ...ress the VENT button and hold it until the Vent LED comes on 2 Place the Rough pump power switch in the OFF position 3 Turn the Rough pump switch breaker to the ON position to return the Leak Detector...

Page 65: ...any of the functions Refer to Section G Leak Detection Theory for information on turret connectors The service pendant is used to set up and monitor Reject set point Crossover pressures Auto sequence...

Page 66: ...uto Zero functions See Section G Leak Detection Theory on page G 1 for details 3 9 Optional Discrete I O To use the optional discrete I O connections connect to J120 and J121 on the rear panel Refer t...

Page 67: ...s Heed the following notes cautions and warnings when performing maintenance WARNING Disconnect power from the 947 948 960 before performing any maintenance procedure that requires physically disconne...

Page 68: ...OTE Normally the use of vacuum grease is unnecessary If it must be used use it sparingly and avoid silicone types Apiezon L grease is recommended Varian P N 695400004 When removing checking or replaci...

Page 69: ...eduled maintenance functions in this section are grouped by recommended frequency as shown in Table 4 1 based on assumed everyday use The 947 948 960 operates at its peak when maintenance preventive p...

Page 70: ...page 4 31 TC1 gauge needs replacement as indicated by the fact that Test port pressure does not come down atmosphere indication when start button is pushed test mode assuming no leaks Test port pressu...

Page 71: ...pecifications cannot be met Manual Tuning is required Manual Tuning is restricted to trained qualified customer technicians Contact Varian Vacuum Technologies Customer Service at 1 800 8VARIAN if manu...

Page 72: ...checks are completed 2 If vent grooves exist at flanges or other assembled seals apply helium to these points rather than spraying a general area to Obtain the most positive response Minimize the use...

Page 73: ...stated on its label Failure to check the leak could result in unreliable testing You can arrange for testing and re calibration at a lab of your choice Varian Vacuum Technologies provides NIST traceab...

Page 74: ...r to Liquid Nitrogen Cold Trap Models 948 960 only on page 4 10 2 Remove the top panel of the 947 948 960 3 Vent the turbo by turning the knurled nut on the turbo pump turn clockwise and then close it...

Page 75: ...he centering ring onto the calibrated leak 4 Insert the calibrated leak into the cavity orienting the leak so the value can be read easily NOTE To ensure reliable testing after servicing any part of t...

Page 76: ...p to vent the trap 3 Don protective gear such as loose fitting gloves and eye or face shield and remove the cold trap WARNING Liquid nitrogen causes burns upon contact 4 Clean the trap with soap and w...

Page 77: ...s 948 960 only on page 4 10 for the procedure to empty the Cold Trap steps 1 2 and 3 Do not refill the Cold Trap until service is complete There are three basic sub assemblies in the spectrometer tube...

Page 78: ...960 only on page 4 10 for the procedure to empty the Cold Trap steps 1 2 and 3 Do not refill the Cold Trap until service is complete To remove the spectrometer tube 1 Insert the plug in the test port...

Page 79: ...must be pushed to unlock the connector then pull the connector to the right to remove it Figure 4 2 947 948 960 Spectrometer Tube Removal 7 Hold the spectrometer tube and loosen the wing nut holding t...

Page 80: ...r tube body 6 Firmly but gently separate the flange cap from the ion source 7 Remove both the O ring on the ion source and the ion source 8 Remove the ground slit plate from the ion source cavity with...

Page 81: ...Ion Source and especially before smoking or eating CAUTION Do not use methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum Do not clean any a...

Page 82: ...collector housing assembly with the ends of the seal crossed under one of the screw holes Figure 4 4 View A 2 Mount the collector housing assembly to the spectrometer tube body with the four socket h...

Page 83: ...prongs are facing up then align the slit at 90 with the side wall of the spectrometer tube and concentrically align the circular hole in the plate with the smaller guide hole in the bottom of the ion...

Page 84: ...m which it was removed replace and tighten the four screws that fit into the magnet assembly 12 Insert the pole pieces and the black plastic knobs making sure that the pole pieces are snug against the...

Page 85: ...refill the Cold Trap until service is complete To reinstall the spectrometer tube 1 Place the cleaned new ungreased centering ring and O ring on the vacuum flange of the spectrometer tube 2 Hold the s...

Page 86: ...removal of the front lower panel exposes the air filter as shown in Figure 4 8 When buildup of dirt dust or other contaminants is apparent replace the filter with a commercial filter size 16 x 20 x 1...

Page 87: ...8 960 for testing CAUTION Use powder free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces The preamplifier is a static sensitive device Wear a grounding device while...

Page 88: ...of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 5 Replace the front panel and connect mains power 6 Turn the leak detector on and wait...

Page 89: ...ock to replace the TC1 thermocouple gauge To replace the TC1 gauge in the Main Valve Block Assembly MVBA 1 Press the VENT button on the front panel to vent the leak detector 2 Disconnect the mains pow...

Page 90: ...ny dirt or foreign matter from the backing ring otherwise wipe it with a lint free cloth 9 Place the backing ring and then the O ring onto the end of the new thermocouple gauge and move them down towa...

Page 91: ...until service is complete Figure 4 11 shows the valve block removed from the system To replace the TC2 gauge in the Service Block Assembly SBA 1 Press the VENT button on the front panel to vent the l...

Page 92: ...and tighten it fully 11 Place the O ring onto the centering ring and onto the flange of the SBA 12 Place the adapter against the center ring 13 Replace the KF25 clamp and tighten the wing nut fully 14...

Page 93: ...To perform this procedure 1 Verify that the leak detector is in the READY condition the NOT READY LED is not illuminated and that the test port plug is in place 2 If the system is not already in VENT...

Page 94: ...960 3 Wait for the system NOT READY LED to illuminate 4 Open the turbo vent screw located on the side of the turbo pump housing 5 On the Service Pendant press shift and the SY TC ATM key The Pendant s...

Page 95: ...s the VENT button and verify that the VENT LED is illuminated 3 Remove the plug from the test port and place a T Manifold 1 1 8 inches 28 mm OD into the test port 4 Attach a Tuning Leak Varian P N K16...

Page 96: ...fully Remove the PC and connect the Service Pendant Perform the next part of the calibration procedure Atmospheric Calibration 4 2 7 7 Atmospheric Calibration To perform atmospheric calibration 1 If t...

Page 97: ...h pump and Forepump are equipped with an oil level sight glass that can be viewed when the front lower panel cover is removed Figure 4 12 Refer to your pump manual for the proper oil level If it is lo...

Page 98: ...ng the leak detector be sure to turn the leak detector off disconnect it from mains power and for Models 948 960 remove and empty the cold trap 4 2 9 1 Removing the Test Port CAUTION If cleaning the t...

Page 99: ...nance procedure requiring that O rings be removed 3 Before re using O rings or installing new O rings wipe them down with a lint free cloth before installation to ensure that no foreign matter is pres...

Page 100: ...tight enough to stay in place 4 Place the test port plug into the test port tightening nut making sure it is completely seated 5 Tighten the test port tightening nut completely 4 3 Spare Parts Spare...

Page 101: ...s Part Part Number Where Used Spectrometer Tube Assembly K9735301 947 948 960 Service Block piece part R0028001 947 948 960 Main Block piece part K9614301 947 948 960 Gross Leak Assembly R1498301 947...

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Page 103: ...s error conditions as listed in Figure 5 1 on page 5 2 on the Leak Rate Exponent display item 9 in Figure 1 3 on page 1 6 To begin Verify that the leak detector is plugged into an appropriately powere...

Page 104: ...n page 4 1 Replace ion source if necessary c5 Auto calibrate function is out of range Leak detector requires maintenance Notify Varian Vacuum Technologies Customer Service c6 Auto tune function is out...

Page 105: ...ead correctly high test port pressure reading Clean TC gauge If problem persists replace TC gauge Models 948 960 only Excessive moisture in the cold trap Dry out the cold trap A warm up period is nece...

Page 106: ...manifold or vacuum lines are leaking Check for leaks Pump drain plugs are loose Tighten the drain plugs Turbo pump not running No power Check the outlets power switch and circuit breakers Leaks Tight...

Page 107: ...1 Keypad Functions Figure A 1 shows the service pendant keypad Glossary of Function Keys on page A 3 explains the keys that perform special functions when entering information Glossary of Input and Da...

Page 108: ...ect set point value and see if it is enabled on or off Press 1 the number of the reject set point you want to display i e 1 though 4 Press The currently enabled set point is displayed along with its v...

Page 109: ...nters the E for exponential notation inputs such as reject set point SHIFT LK RATE E Displays the current leak rate _ Enters a decimal point for input values such as in rangestop SHIFT _ Enters a minu...

Page 110: ...ecade Log format SET GR XFR SHOW Displays the value of the Gross Leak Transfer Point SHIFT SET GR XFR SHOW Sets the value of the Gross Leak Transfer Point Enter X XE X the desired value followed by SH...

Page 111: ...n key INIT RPLR PUT Sets a temporary new value for Repeller Voltage Enter XXX the desired value then the function key SHIFT INIT RPLR PUT Sets a permanent new value for Repeller Voltage Enter XXX the...

Page 112: ...PUT Sets a permanent new value for System Gain Enter X X the desired value followed by the SHIFT key then the function key INIT EMIS PUT Sets a temporary new value for Emission Current Enter XXXX the...

Page 113: ...cer function SHIFT ON A SEQ OFF Turns on the Auto Sequencer function 2 FIL SEL 1 Selects filament 1 in the Ion Source SHIFT 2 FIL SEL 1 Selects filament 2 in the Ion Source OUT V SHOW FIL Displays the...

Page 114: ...1 Enter X XE X the desired value then the function key SHIFT REJ3 SET REJ 1 Sets the leak rate value for Reject Set Point 3 Enter X XE X the desired value followed by the SHIFT key then the function...

Page 115: ...or service heed the following WARNING Disconnect power from the 947 948 960 before performing any maintenance procedure that requires physically disconnecting any part of the system CAUTION Models 948...

Page 116: ...helf 1 Loosen the screws of the service pendant serial connection and remove the connection Figure B 1 NOTE The service pendant power cable is still attached to the electronics housed beneath the pend...

Page 117: ...endant shelf using the procedure described in Removing the Service Pendant Shelf on page B 2 3 Remove the 3 8 nuts located under the front corners of the frame of the chassis Figure B 2 Figure B 2 The...

Page 118: ...placing the Service Pendant Shelf To replace the service pendant shelf 1 Place the shelf into the turret guiding the power wire through the area beside the shelf near the serial connection 2 Replace t...

Page 119: ...ace the top cover onto the frame fitting it around the front of the chassis the start and stop button panel the test port and the upper back of the turret 2 Working at the rear of the leak detector pl...

Page 120: ...tment procedures WARNING Store the Ion Source in a cool dry area in a tightly sealed container Wash hands thoroughly after handling the Ion Source and especially before smoking or eating CAUTION Use p...

Page 121: ...in accordance with local regulations or return it to Varian Vacuum Technologies for exchange 6 Remove the ground slit plate by placing a thin slotted screwdriver into the slot and carefully twisting a...

Page 122: ...ove he ground slit plate and using a screwdriver bend the prongs out slightly Then place it into the cavity again CAUTION A short could result at power up if the alignment pin touches the sides of the...

Page 123: ...mp and two mechanical pumps a forepump and a rough pump B 3 1 Turbo Pump The turbo pump Figure B 6 is located in the middle front of the main cabinet You must remove connections to the valve block spe...

Page 124: ...ing any part of the system CAUTION Models 948 960 only Remove empty and clean the cold trap whenever power is removed Refer to Liquid Nitrogen Cold Trap Models 948 960 only on page 4 10 2 Remove the s...

Page 125: ...o pink connectors labeled 1 and 2 If the connections are not fully labeled label them now Figure B 8 Figure B 8 The Turbo Power Connection 5 Loosen the radiator clamp screw and remove the fan from the...

Page 126: ...ine connection Figure B 7 on page B 10 Remove the foreline centering ring and O ring and place them on a clean surface 9 Remove the turbo pump 10 Remove the ISO50 centering ring and O ring and place t...

Page 127: ...edure 1 Place the O ring on the ISO50 centering ring 2 Place the centering ring against the top of the turbo pump 3 Hold the turbo pump against the SVBA oriented so that the flange for the foreline co...

Page 128: ...t connected already 12 Place the turbo fan assembly against the turbo pump oriented so that the fan is on the front of the pump with the guard facing outward 13 Place the radiator clamp around the tur...

Page 129: ...ide of the main cabinet Figure B 10 shows the front view of wet and dry pump configurations WARNING To avoid injury use proper lifting techniques when moving pumps Your system may have pumps that requ...

Page 130: ...Remove the right side panel 4 Disconnect the pump power plug from the 947 948 960 5 Drain the oil according to the pump manual instructions 6 If you are replacing the pump as part of a Varian exchang...

Page 131: ...the bolts that connect the pump to the bottom of the main cabinet Figure B 10 on page B 15 NOTE You may have to loosen the radiator clamps on the tygon tubing and slide it up the line to remove the pu...

Page 132: ...abinet aligning the holes in the pump over the mounting holes in the floor of the cabinet 3 Working from beneath the cabinet place the bolts into the mounting holes replace the nuts but do not tighten...

Page 133: ...rmed before closing the panels or powering up the pump CAUTION To ensure reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checkin...

Page 134: ...have pumps that require two people to move them safely 2 Remove the front panel 3 Remove the right side panel 4 Disconnect the power plug of the pump from the 947 948 960 The plug is located behind t...

Page 135: ...10 on page B 15 placing the mounting bolts into the holes in the floor of the cabinet 3 Place the centering ring and O ring against the pump outlet on the left side of the pump 4 Place the manifold ag...

Page 136: ...947 948 960 using the procedure described in Re calibrate the Internal Calibrated Leak on page 4 7 18 Leak check the assembly before using the 947 948 960 for testing B 5 Replacing the Forepump B 5 1...

Page 137: ...left side panel 4 Unplug the power plug of the pump from the 947 948 960 5 Drain the oil following the instruction included in the pump manual 6 Remove the NW25 clamp from the left manifold 7 Remove t...

Page 138: ...n moving pumps Your system may have pumps that require two people to move them safely To perform this procedure 1 Ensure the area is clean for the new pump 2 Place the new pump in the 947 948 960 orie...

Page 139: ...ing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 15 Replace the front panel 16 Replace the side panel 17 R...

Page 140: ...ap Models 948 960 only on page 4 10 WARNING To avoid injury use proper lifting techniques when moving pumps Your system may have pumps that require two people to move them safely 2 Remove the front pa...

Page 141: ...2 Remove the centering ring and O ring and place them on a clean surface B 5 2 1 4 Removing the Pump from the Cabinet To perform this procedure 1 Working from beneath the main cabinet remove the four...

Page 142: ...outlet on the left side of the pump 4 Place the manifold against the centering ring If necessary shift the pump so that the connection is clean and there is no strain on the manifold 5 Place the NW25...

Page 143: ...reliable testing after servicing any part of the vacuum system the 947 948 960 must be leak checked again Refer to Leak Checking on page 4 5 for guidelines 3 Replace the front panel 4 Replace the side...

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Page 145: ...nds for the controlling device to set the current state or value of a volatile leak detector parameter Words that begin with INIT are commands for the controlling device to set non volatile leak detec...

Page 146: ...tage REPELLER 402 2 Reports the repeller voltage FIXEDFOCUS 212 7 Reports the fixed focus voltage SUPPRESSOR 145 0 Reports the suppressor voltage EMISSIONCURRENT 1 040Reports the emission current OFFS...

Page 147: ...ond line Consists of the words system TC followed by a number of mTorr RANGESTOP A string of three characters that tells the most sensitive range exponent when the auto range function is operating REJ...

Page 148: ...ting of a two digit calibration standard leak rate mantissa with a decimal point after the first digit followed by E then by a two digit number which is the calibration standard leak rate range expone...

Page 149: ...NIT FL XFER Sets the minimum pressure in Torr that must be attained to transfer from gross leak to fine leak test A seven character string two mantissa digits with a decimal point between them E and a...

Page 150: ...a decimal point after the first digit E and a single digit which is the leak rate range exponent Values outside the working range of the leak detector are not stored INIT TEST A one to three digit nu...

Page 151: ...EP Causes the leak detector to close most valves and enter the HOLD state No parameters ROUGH Causes the leak detector to begin a roughing and testing sequence No parameters SYTCATM Sets the current s...

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Page 153: ...Interface J120 The discrete I O DB37 connector is used to control operations via a PLC Table D 2 provides details about this connection Table D 1 Service Serial Interface J1 Pin Signal Name Descriptio...

Page 154: ...Range Active High Automatically changes the exponent to keep the reading in range Input 14 Hold Not used Input 15 Filament Fault Active High Active when the selected ion source filament is non functio...

Page 155: ...ate Update Pulse Output Leak rate is updated on falling edge and is stable as long as output is low Output Mantissa 3 LSD A Active High BCD Leak Rate Output 4 LSD B Active High BCD Leak Rate Output 5...

Page 156: ...Table D 5 provides details about this connection Table D 4 Optional Interface J122 for Optional Universal Remote Control Pin Name Signal Description Output Input Level 1 Shield System Ground 2 DATA IN...

Page 157: ...Flow Contra Flow with Cold Trap Cold Trap Capacity N A Liquid nitrogen hold for 14 hours after vacuum system cool down Helium Sensitivity atm cc sec 2 x 10 10 2 x 10 9 2 x 10 10 2 x 10 9 Response Tim...

Page 158: ...service pendant atmospheric gross leak external calibrated helium Leaks Recommended Ambient Operating Conditions Indoor use Altitude up to 2000 m Temperature 10 C to 38 C 50 F to 100 F Maximum relati...

Page 159: ...0300M220 V70D DS 302 DS 202 947 MacroTorr LD L94720450M120 L94720450M220 V70D DS 402 DS 202 947D Turbo Dry LD D94735350T120 D94735350T220 V70 TriScroll 300 TriScroll 300 947D Turbo Dry LD D94735550T12...

Page 160: ...96009300T120 L96009300T220 V70 SD 301 SD 91 D96035350T120 D96035350T220 V70 TriScroll 300 TriScroll 300 and V70D D96035550T120 D96035550T220 V70 TriScroll 600 TriScroll 600 and V70D Table E 2 947 948...

Page 161: ...all Varian Vacuum Technologies for further information at 1 800 8VARIAN Factory installed option Table F 1 947 948 960 Accessories Part Number Option L9558301 Universal remote control display unit wit...

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Page 163: ...Detection There are four general classes of leak detection Hermetic Enclosures or parts thereof These are tested to prevent entrance of contaminants or loss of fluid that would affect performance of t...

Page 164: ...flow rate should be expressed in torr liters second Conversions 1 std cc sec 0 76 torr liter sec 1 torr liter sec 1 3 std cc sec 1 std cc sec 9 7 x 104 micron cubic feet per hour or practically 105 mi...

Page 165: ...3 atm cc sec It tests for ultrasonic sounds coming from a gas leak and for testing high pressure lines Halogen sensitive to halogen elements or compounds especially refrigerant gases This method is go...

Page 166: ...d The resulting current is amplified and a leak rate bar graph indicates the presence and amount of helium G 5 2 Application as a Leak Detector A mass spectrometer leak detector consists of a spectrom...

Page 167: ...cc sec per square centimeter of surface area Variation in Leak Sizes Leaks unintentionally built in at joints during manufacture can vary from hour to hour and day to day Breathing on a 10 6 std cc s...

Page 168: ...then probed with a small jet of helium to locate individual leaks or surrounded by helium hooded for an overall leak check Figure G 1 Test Piece Evacuated Tracer Probe Used to Locate Leak Figure G 2 T...

Page 169: ...4 Test Piece Sealed with Helium and or Other Gases Bell Jar Used to DetermIne Overall Leak Rate Sometimes it is necessary to leak check a completely sealed object This can be done by placing helium i...

Page 170: ...ector which neutralizes the current produced by the collection of helium ions The feedback current is presented on the leak rate bar graph Since this current is directly proportional to the number of...

Page 171: ...D Daily maintenance 4 5 Decimal notation table G 2 Diagnostics using the service pendant 3 16 Discrete I O option 2 9 3 16 J120 inputs 2 5 Parallel enable 2 11 Parallel interface D 1 Dual mechanical...

Page 172: ...urized G 6 Leak detector maintenance 4 1 Leak detector storage 1 13 Leak rate 3 5 G 5 G 6 Leak test methods G 3 Dye penetrant G 3 Halogen G 3 Helium G 3 Radioisotope G 3 Ultrasonic G 3 Water immersion...

Page 173: ...0 Operation description 947 1 2 Operation description 948 1 3 Optional interface Electronic communications 2 5 O rings 4 2 4 13 4 15 4 18 4 20 B 8 P Parallel enable 2 11 3 16 Parameter setup 3 3 3 16...

Page 174: ...s and parts for overhaul 4 11 Spectrometer tube exchange 4 22 Standard leak test valve indicator 3 2 Standby mode 3 15 Start button indicator 3 2 Start up controls 3 8 Start up procedure 3 10 Storage...

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Page 176: ...House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax...