Varian 969-9047 series, Instruction Manual

Page 1: ...9050 series MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK S...

Page 2: ...Turbo V 550...

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Page 5: ...CAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 AIR COOLING KIT INSTALLATION 31 GAS PURGE VALVE INSTALLATION 32 VENT VALVE INSTALLATION...

Page 6: ...condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante Se il tempo di immagazzinamento molto lungo avviare la pompa nel modo SOFT START vedere il manuale del control le...

Page 7: ...ZIONE Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressi...

Page 8: ...k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen m ssen folgende klimatische Verh ltniss...

Page 9: ...n GEFAHR W hrend des Ausheizens d rfen weder die Pumpe noch eventuelle hei e Anschlu teile ber hrt werden denn es besteht Verbrennungsgefahr ACHTUNG F r die Bel ftung der Pumpe trockene staub und part...

Page 10: ...renseignements importants isol s du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il faudra veiller respecter les conditions environnementales suivantes temp rature de 20 C 70 C...

Page 11: ...fage DANGER Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulem...

Page 12: ...del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deber cumplir con las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no conden...

Page 13: ...nes de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a tra...

Page 14: ...destacadas do texto ARMAZENAGEM Durante o transporte e a armazenagem das bombas n o devem ser superadas as seguintes condi es ambientais temperatura de 20 C a 70 C humidade relativa 0 95 n o condensan...

Page 15: ...tilizar sempre o resfriamento com gua durante as opera es de aquecimento PERIGO N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode caus...

Page 16: ...ie die uit de tekst is gelicht OPSLAG Tijdens het transport en de opslag van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet...

Page 17: ...ijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de...

Page 18: ...ade p udstyret BEM RK Bem rkningerne indeholder vigtige yderligere oplysninger OPLAGRING Under transport og oplagring af pumpene skal f lgende omgivelsesbetingelser v re overholdt temperatur fra 20 C...

Page 19: ...elser p personer PAS P Til pumpens luftafl b anvendes luft eller en inaktiv luftart der er fri for st v og partikler Indgangstrykket gennem den s rlige bning skal v re under 2 bar PAS P Undg sammenst...

Page 20: ...ramf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F RVARING F ljande krav p omgivningsf rh llanden g ller vid t...

Page 21: ...d inloppet aldrig bli h gre n 120 C Under uppv rmningen m ste vattenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VIKTIGT Anv...

Page 22: ...dersom de ikke f lges kan f re til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten LAGRING N r pumpene transporteres eller lagres m f lgende milj messige kr...

Page 23: ...turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inaktiv gass ved lufting av pumpen Trykket v...

Page 24: ...taa laitteen vahingoittumiseen HUOMAUTUKSET Huomautuksissa k yv t ilmi tekstiss k sitellyt t rke t tiedot VARASTOINTI Pumppujen kuljetuksen ja varastoinnin aikana t ytyy seuraavien ymp rist a koskevie...

Page 25: ...mp tila saa olla yli 120 C K ytt k aina kuumentamisen aikana vett j hdytykseen VAARA lk koskeko turbopumppuun tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden louk...

Page 26: ...seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH Kat th di rkeia thj metafor j kai thj apoq keushj twn antli n pr pei na thro ntai oi ak louqej periballontik j sunq ke...

Page 27: ...xh KINDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na diocete sete me a ra thn antl...

Page 28: ...environmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see control un...

Page 29: ...t gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure CAUTION Avoid impacts oscillations or harsh movements of the pum...

Page 30: ...48 Model 969 9049 Model 969 9050 The external body of the pump is shaped so that the pump can function with natural convection air cooling Kits are available for water cooling or forced air cooling to...

Page 31: ...diaphragm Varian MD 60 Operating position Any Cooling requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 200 l h 0 89 GPM tem...

Page 32: ...TION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 2...

Page 33: ...reen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on each pump The screen can be removed...

Page 34: ...t a high temperature a shield should be installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 120 C The heater band...

Page 35: ...These hoses must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit wit...

Page 36: ...the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller A fan kit model 969 9314 is available for air cool ing the pump Fan specificati...

Page 37: ...e purge port cover as shown in the fol lowing figure The vent valve mod 969 9833 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic...

Page 38: ...the thread on the pump Screw the flange mod 969 9109 on the pump tak ing care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp VENT DEVICE IN...

Page 39: ...amps or claws as shown in the figure For ConFlat flange connections we recommend using Varian hardware 1 Turbo V controller To facilitate assembly and dismantling apply Fel pro C 100 high temperature...

Page 40: ...a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming The turbopump is connected to the control...

Page 41: ...n 1 Close the corrosive gas flow into the system The result is increased electrical power consump tion by the motor most of which is dissipated in the rotor 2 Leaving the Turbo V pump and the backing...

Page 42: ...n damper ISO 160 969 9345 Vibration damper CFF 8 969 9335 Vent flange NW 10 KF 969 9109 Vent valve with fixed delay time 969 9833 Vent device with adjustable delay time 969 9831 Forepump DS 302 with 1...

Page 43: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 44: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 45: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...