Varian 969-9860 Instruction Manual Download

Page: 19 / 19

Sales and Service Offices

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172

Australia

Varian Australia Pty Ltd.

679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950

Benelux

Varian Vacuum Technologies

Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350

Canada

Central coordination through:

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6608 1530
Fax: (86) 10 6608 1534

France and Wallonie

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08

Germany and Austria

Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445

Italy

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472

Taiwan

Varian Technologies Asia Ltd.

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678

UK and Ireland

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769

United States

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

Other Countries

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Internet Users:

Customer Service & Technical Support:

vtt.customer.service@varianinc.com

Worldwide Web Site:

www.varianinc.com/vacuum

Order On-line:

www.evarian.com

Representatives in most countries

11/01

Summary of Contents for 969-9860

Page 1: ...87 900 847 01 B APRIL 2002 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI INSTRUCTION MANUAL Hand held Terminal Model 969 9860 vacuum technologies ...

Page 2: ...Hand held Terminal ...

Page 3: ......

Page 4: ......

Page 5: ...SCRIPTION 5 USE 5 General 5 Monitor Mode 5 Program Mode 5 FRONT REMOTE 232 Selection 5 Monitor Relay Programming 6 Reset Command 7 Starting the Pump 8 Operating the Pump 8 Low Speed Operation 8 Speed Adjustment 9 Pump Shutdown 10 Power Failure 10 Remote Control Mode Operation 10 RS 232 Control Mode Operation 10 ERROR MESSAGES 11 ...

Page 6: ...le Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere l Hand Held Terminal e a non sottoporlo ad urti Non disperdere l imballo nell ambiente Il materiale è completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Comandi indicatori e connettori dell Hand Held Terminal Di seguito sono illustrati il pannello dell Hand Held Te...

Page 7: ...ändigen örtlichen Verkaufsstelle gemeldet werden Beim Auspacken vorsichtig vorgehen damit dem Gerät nicht herunter fällt oder Stößen ausgesetzt wird Das Verpackungsmaterial muß korrekt entsorgt werden Es ist vollständig recyclebar und entspricht der EG Richtlinie 85 399 für Umweltschutz Steuerungen Anzeigen und Anschlüsse des Handterminals Nachstehend werden die Steuertafel des Handterminals Für w...

Page 8: ... particulièrement à ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le matériel est entièrement recyclable et il est conforme aux directives CEE 83 399 en matière de protection de l environnement Commandes indicateurs et connecteurs du hand held terminal On présente ci dessous le tableau de commande du hand held terminal Pour de plus a...

Page 9: ...ffice When unpacking the Hand held terminal ensure that it is not dropped or subjected to any form of impact Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Hand held Terminal Controls Indicators and Connectors The following paragraph illustrates the Hand held terminal panel More details are contained in the ap...

Page 10: ...speed of the pump as a function of the controller output frequency range 17 to 99 KRPM C is the temperature of the outer ring of the upper bearing range 00 to 99 C X during operation a selected set point condition 1 or 2 contrast inverted appears when the programmed threshold speed value is not reached Press the CYCLE NUMBER once and the display shows X X X X C Y C L E X X X X X m P U M P L I F E ...

Page 11: ...following figure Monitor Relay Programming The display shows S P E E D T H R E S H O L D S E L E C T I O N X X K R P M where XXKRPM is the switch point of relay R1 at the preset turbopump speed adjustable from 00 to 99 KRPM The speed threshold will condition the R1 and R2 operation see the following cycle diagram Select the first number by pressing the CYCLE NUMBER push button then enter the value...

Page 12: ... I F E X X X X X h R E S E T X X X where PUMP LIFE is the elapsed operating time range 000 to 99999 hours RESET XXX YES or NO If YES is selected the pump life shall be reset to 000 After selecting YES press the PUMP CURRENT push button to enter the command and the display shows as follows I 0 0 0 A P 0 W X K R P M X X C NOTE When PUMP LIFE is reset to 000 the CYCLE number is also reset to 000 ...

Page 13: ...en the pump reaches the normal speed the display reverts to the previous figure Operating the Pump After the starting period if the system has a vacuum leak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the turbopump inlet flange continues to stay high the power drawn by the turbopump increases up to the maximum ...

Page 14: ...essing CYCLE NUMBER and PUMP CURRENT pushbuttons together for at least 4 seconds the processor enters in a routine where it is possible to adjust the rotational speed The display shows H I G H S P E E D S E L E C T X X X X X R P M where XXXXX is the pump rotational HIGH SPEED value selected In this routing the CYCLE pushbutton is used to increase the speed value and the LOW SPEED pushbutton is use...

Page 15: ...tarts the interconnected devices and the turbopump in the proper sequence The display shows P U M P I S S T A R T I N G 1 2 X X K R P M until normal operation achieved Remote Control Mode Operation If remote signals are used to operate the controller it must be programmed for remote operation see paragraph Program Mode and when ready to start the display shows as in the following figure P U M P R ...

Page 16: ... pump NOTE If the controller transformer temperature exceeds 90 C the pump is shut off and the display will be as shown in the following figure F A U L T C O N T R O L L E R O V E R T E M P E R A T U R E The message will stay on until the temperature decreases below threshold value Press the STOP RESET pushbutton twice to start the pump NOTE If in normal condition the current drawn by the pump is ...

Page 17: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Page 18: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Page 19: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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