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INSTRUCTIONS FOR USE

4

87-900-847-01 (B)

GENERAL INFORMATION

This equipment is destined for use by professionals.
The user should read this instruction manual and any
other additional information supplied by Varian before
operating the equipment. Varian will not be held
responsible for any events occurring due to non-
compliance, even partial, with these instructions,
improper use by untrained persons, non-authorised
interference with the equipment or any action contrary
to that provided for by specific national standards.

The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
the "Technical Information".

This manual uses the following standard protocol:

!

The warning messages are for attracting the attention
of the operator to a particular procedure or practice
which, if not followed correctly, could lead to serious
injury.

CAUTION!

The caution messages are displayed before
procedures which, if not followed, could cause damage
to the equipment.

NOTE

The notes contain important information taken from the
text.

STORAGE

When transporting and storing the devices, the
following environmental requirements should be
satisfied:

  temperature: from -20 °C to + 70 °C

  relative humidity: 0 - 95%

(without condensation)

PREPARATION FOR INSTALLATION

The device is supplied in a special protective packing.
If this shows signs of damage which may have
occurred during transport, contact your local sales
office. When unpacking the Hand-held terminal, ensure
that it is not dropped or subjected to any form of
impact. Do not dispose of the packing materials in an
unauthorized manner. The material is 100% recyclable
and complies with EEC Directive 85/399.

Hand-held Terminal Controls, Indicators and
Connectors

The following paragraph illustrates the Hand-held
terminal panel. More details are contained in the
appendix "Technical Information".

1.

 Keyboard  push-button for LOW SPEED mode

selection. It is active only when the front panel
operation has been selected. Pressed once, the pump
runs at about 2/3 of the nominal speed. To unselect the
mode, press the push-button again.

2.

 Keyboard push-button for START, STOP, RESET

mode selection. It is active only when the front panel
operation has been selected. By pressing once the
starting phase begins; if pressed again it stops the
pump. If the pump has been stopped automatically by
a fault, this push-button must be pressed once to reset
the device

 

and a second time to restart the pump.

3.

  Keyboard push-button to recall on the display the cycle

number, cycle time and pump life.

4.

  Keyboard push-button to recall on the display the pump

current, pump temperature, pump power and rotational
speed. It is always active regardless of the operating
mode selected. Push-buttons 3 and 4, if pressed
together for  at least 2 seconds, put the device in a
routine where it is possible to program some operation
parameters.

5.

  LCD back-lighted alphanumeric display: dot matrix 2

lines x 16 characters.

Hand Held Terminal Front Panel

NOTE

LOW SPEED and START/STOP RESET functions are
active only if the FRONT panel mode of operation is
selected  (see  "Technical Information").

WARNING!

Summary of Contents for 969-9860

Page 1: ...87 900 847 01 B APRIL 2002 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI INSTRUCTION MANUAL Hand held Terminal Model 969 9860 vacuum technologies ...

Page 2: ...Hand held Terminal ...

Page 3: ......

Page 4: ......

Page 5: ...SCRIPTION 5 USE 5 General 5 Monitor Mode 5 Program Mode 5 FRONT REMOTE 232 Selection 5 Monitor Relay Programming 6 Reset Command 7 Starting the Pump 8 Operating the Pump 8 Low Speed Operation 8 Speed Adjustment 9 Pump Shutdown 10 Power Failure 10 Remote Control Mode Operation 10 RS 232 Control Mode Operation 10 ERROR MESSAGES 11 ...

Page 6: ...le Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere l Hand Held Terminal e a non sottoporlo ad urti Non disperdere l imballo nell ambiente Il materiale è completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Comandi indicatori e connettori dell Hand Held Terminal Di seguito sono illustrati il pannello dell Hand Held Te...

Page 7: ...ändigen örtlichen Verkaufsstelle gemeldet werden Beim Auspacken vorsichtig vorgehen damit dem Gerät nicht herunter fällt oder Stößen ausgesetzt wird Das Verpackungsmaterial muß korrekt entsorgt werden Es ist vollständig recyclebar und entspricht der EG Richtlinie 85 399 für Umweltschutz Steuerungen Anzeigen und Anschlüsse des Handterminals Nachstehend werden die Steuertafel des Handterminals Für w...

Page 8: ... particulièrement à ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le matériel est entièrement recyclable et il est conforme aux directives CEE 83 399 en matière de protection de l environnement Commandes indicateurs et connecteurs du hand held terminal On présente ci dessous le tableau de commande du hand held terminal Pour de plus a...

Page 9: ...ffice When unpacking the Hand held terminal ensure that it is not dropped or subjected to any form of impact Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Hand held Terminal Controls Indicators and Connectors The following paragraph illustrates the Hand held terminal panel More details are contained in the ap...

Page 10: ...speed of the pump as a function of the controller output frequency range 17 to 99 KRPM C is the temperature of the outer ring of the upper bearing range 00 to 99 C X during operation a selected set point condition 1 or 2 contrast inverted appears when the programmed threshold speed value is not reached Press the CYCLE NUMBER once and the display shows X X X X C Y C L E X X X X X m P U M P L I F E ...

Page 11: ...following figure Monitor Relay Programming The display shows S P E E D T H R E S H O L D S E L E C T I O N X X K R P M where XXKRPM is the switch point of relay R1 at the preset turbopump speed adjustable from 00 to 99 KRPM The speed threshold will condition the R1 and R2 operation see the following cycle diagram Select the first number by pressing the CYCLE NUMBER push button then enter the value...

Page 12: ... I F E X X X X X h R E S E T X X X where PUMP LIFE is the elapsed operating time range 000 to 99999 hours RESET XXX YES or NO If YES is selected the pump life shall be reset to 000 After selecting YES press the PUMP CURRENT push button to enter the command and the display shows as follows I 0 0 0 A P 0 W X K R P M X X C NOTE When PUMP LIFE is reset to 000 the CYCLE number is also reset to 000 ...

Page 13: ...en the pump reaches the normal speed the display reverts to the previous figure Operating the Pump After the starting period if the system has a vacuum leak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the turbopump inlet flange continues to stay high the power drawn by the turbopump increases up to the maximum ...

Page 14: ...essing CYCLE NUMBER and PUMP CURRENT pushbuttons together for at least 4 seconds the processor enters in a routine where it is possible to adjust the rotational speed The display shows H I G H S P E E D S E L E C T X X X X X R P M where XXXXX is the pump rotational HIGH SPEED value selected In this routing the CYCLE pushbutton is used to increase the speed value and the LOW SPEED pushbutton is use...

Page 15: ...tarts the interconnected devices and the turbopump in the proper sequence The display shows P U M P I S S T A R T I N G 1 2 X X K R P M until normal operation achieved Remote Control Mode Operation If remote signals are used to operate the controller it must be programmed for remote operation see paragraph Program Mode and when ready to start the display shows as in the following figure P U M P R ...

Page 16: ... pump NOTE If the controller transformer temperature exceeds 90 C the pump is shut off and the display will be as shown in the following figure F A U L T C O N T R O L L E R O V E R T E M P E R A T U R E The message will stay on until the temperature decreases below threshold value Press the STOP RESET pushbutton twice to start the pump NOTE If in normal condition the current drawn by the pump is ...

Page 17: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Page 18: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Page 19: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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