FRG-700 Inverted Magnetron Pirani Gauge
10
3 Installation
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot
withstand such pressures. Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering ring.
DANGER
DANGER: protective ground
Products that are not professionally connected to ground can be
extremely hazardous in the event of a fault.
The gauge must be electrically connected to the grounded vacuum
chamber. The connection must conform to the requirements of
protective connection according to EN 61010:
•
CF connections fulfill this requirement.
•
For gauges with KF connections, use a conductive metallic clam-
ping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of operation
and remove the electronics unit.
3.1 Vacuum Connection
