Varian FRG-700 series, Instruction Manual

Page 1: ...vacuum technologies FRG 700 Inverted Magnetron Pirani Gauge INSTRUCTION MANUAL Manual No tqna48e1 Revision November 2008...

Page 2: ...2 FRG 700 Inverted Magnetron Pirani Gauge Copyright 2008 Vacuum Technologies...

Page 3: ...epresentatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be bin ding upon Seller unless reduced to writing and approved by an officer of Seller Warranty...

Page 4: ...the right to make technical changes without prior notice All dimensions in mm The Inverted Magnetron Pirani Gauge FRG 700 has been designed for vacuum measurement in the pressure range of 5 10 9 1000...

Page 5: ...ges With CF Flanges 12 3 2 Electrical Connection 13 3 2 1 Use With an VARIAN Controller 13 3 2 2 Use With Another Control Device 13 4 Operation 14 4 1 Measurement Principle Measuring Behavior 14 5 Dei...

Page 6: ...ocess media Consider possible reactions e g explosion of the process media due to the heat generated by the product Adhere to the applicable regulations and take the necessary precautions for all work...

Page 7: ...85 k referenced to supply common Status Pin 6 p 10 2 mbar Pirani only mode Low 0 V p 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V p 10 2 mbar Cold cathode ignited Combined Pirani cold c...

Page 8: ...curacy 10 V Supply common signal common conducted separately Materials exposed to vacuum Vacuum connection Measuring chamber Feedthrough Internal seals Anode Ignition aid Pirani measuring tube Pirani...

Page 9: ...FRG 700 Inverted Magnetron Pirani Gauge 9 Dimensions mm 18 DN 25 ISO KF DN 40 CF F 24 92 63 5 28 55 60 75 Weight FRG700KF25 FRG700CF35 700 g 980 g...

Page 10: ...n the event of a fault The gauge must be electrically connected to the grounded vacuum chamber The connection must conform to the requirements of protective connection according to EN 61010 CF connect...

Page 11: ...stment should be possible after the gauge has been installed be sure to install it so that the HV and ATM trimmer potentiometers can be accessed with a screw driver 17 When making a CF flange connecti...

Page 12: ...difficult to separate the magnet unit and the measuring chamber 7 d Make the flange connection between the gauge and the vacuum system e Remount the magnet unit and lock it with the hexagon head scre...

Page 13: ...m 8 poles FCC 68 1 8 Electrical connection Pin 1 Supply 15 30 VDC Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal common Pin 6 Status Pin 7 8 n c 10 10 Ident...

Page 14: ...d only at pressures 1 10 2 mbar The identification output pin 6 indicates the current status of the gauge Pressure Lamp on the gauge Operating mode Pin 6 p 1 10 2 mbar Pirani only mode Low 0 V p 1 10...

Page 15: ...tion as well as reduced up time and maintenance cycles With constantly low pressures p 1 10 6 mbar the gauge can be operated for more than one year without cleaning cleaning the gauge 19 Contamination...

Page 16: ...acuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare...

Page 17: ...s when working in this area The gauge is factory calibrated If used under different climatic conditions through extreme temperatures aging or contamination and after exchanging the sensor the characte...

Page 18: ...rn the potentiometer counter clockwise by 1 3 of a turn s Vent the gauge with air or nitrogen to atmospheric pressure and wait at least 10 minutes t Turn the nameplate clockwise until the mechanical s...

Page 19: ...ench AF 1 5 Allen wrench AF 3 Open end wrench 7 0 mm Pliers for circlip Polishing cloth 400 grain or Scotch Brite Tweezers Cleaning alcohol Mounting tool for ignition aid Ignition aid Pirani element 1...

Page 20: ...g cloth rub the inside walls of the measuring chamber and the polarity insert to a bright finish The sealing surfaces must only be worked concentrically o Rinse the measuring chamber and the polarity...

Page 21: ...l ignition aid 10a into the measuring chamber p Insert the Pirani element 13 with the FPM seal 13a slid over it into the corresponding bore hole q Carefully place the pressure piece 9 on the measuring...

Page 22: ...fore performing any tightness tests put the product out of operation and remove the electronics unit w Mount the magnet unit 4 and lock it with the screw 3 Carefully mount the electronics unit 2 Make...

Page 23: ...ignited Wait until the gas dis charge ignites in case of contamination with insu lation layers the cold cathode may completely fail to ignite Cleaning 19 The FRG has only been activated with p 3 10 9...

Page 24: ...ng to the spare parts list Pos Description Ordering number 12 13a 11 10a Maintenance kit consisting of 1 support ring 1 O ring FPM 3 69 1 78 1 O ring FPM 10 82 1 78 3 ignition aid FRG700MAINT 13 12 13...

Page 25: ...s Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contami nated Adhere to the relevant regulations and take the necessary pre ca...

Page 26: ...overrange Pa mbar torr Measuring signal U V Pressure p Meas signal U V Pressure p mbar Pressure p Torr Pressure p Pa 0 5 Sensor error 0 5 1 82 Underrange 1 82 2 0 2 6 3 2 3 8 4 4 5 0 5 6 6 2 6 8 7 4...

Page 27: ...8 2 4 6 8 Water vapor peff mbar Indication range above 10 2 mbar Xe Kr Ar CO2 Freon 12 Pressure indicated gauge calibrated for air 6 4 2 6 4 2 6 4 2 10 4 8 6 4 2 10 6 2 4 6 10 5 10 4 Ar 10 5 8 6 4 2...

Page 28: ...conversion formula peff K pressure indicated where gas type K air O2 CO N2 1 0 Xe 0 4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is o...

Page 29: ...FRG 700 Inverted Magnetron Pirani Gauge 29 Notes...

Page 30: ...Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 861 5437 Original English custserv varianinc com t qna48e1 www varianinc com...