FRG-700 Inverted Magnetron Pirani Gauge
4
In all communications with VARIAN, please specify the information given on the
product nameplate. For convenient reference copy that information into the space
provided below:
Model:
PN:
SN:
V W
VARIAN Lexington MA 02421 USA
This document applies to products with part numbers:
FRG700KF25
(DN 25 ISO-KF)
FRG700CF35
(DN 40 CF-F)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document corres-
pond to the gauge with vacuum connection DN 25 ISO-KF. They apply to the
gauge with other vacuum connection by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
The Inverted Magnetron Pirani Gauge FRG-700 has been designed for vacuum
measurement in the pressure range of 5×10
-9
… 1000 mbar.
The Inverted Magnetron Pirani Gauge must not be used for measuring flammable
or combustible gases which react in air.
The gauge can be operated in connection with a VARIAN FRG Control Unit, a
VARIAN Turbo AG Rack Controller, or with another controller.
Over the whole measuring range, the measuring signal is output as a logarithm of
the pressure.
The gauge consists of two separate measurement systems (Pirani and cold
cathode system) the signals of which are combined in such a way that one
measurement signal is output. The Pirani measurement circuit is always on.
Product Identification
Validity
Intended Use
Functional Principle
