vacuum technologies
Pirani Standard Gauge
PVG-500
PVG-502
Instruction Manual
Incl. EC Declaration of Conformity
tqna44e1 (2010-05)
Product Identification
In all communications with VARIAN, please specify the in-
formation on the product nameplate. For convenient refe-
rence copy that information into the space provided below.
Model:
PN:
SN:
V W
Made in Liechtenstein
VARIAN Lexington MA 02421 USA
Validity
This document applies to products with the following part
numbers:
W filament
PVG500KV16
(DN 16 ISO-KF, w/o switching functions)
PVG500KV16S
(DN 16 ISO-KF, with switching functions)
Ni filament
PVG502KV16S
(DN 16 ISO-KF, with switching functions)
The part number (PN) can be taken from the product name-
plate.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Pirani Standard Gauges PVG-500 and PVG-502 have
been designed for vacuum measurement of gases in the
pressure range of 5×10
-4
… 1000 mbar.
They must not be used for measuring flammable or combusti-
ble gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
They can be operated in connection with an VARIAN con-
troller or with another controller.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi-
ronmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
General Safety Instructions
•
Adhere to the applicable regulations and take the nec-
essary precautions for the process media used.
Consider possible reactions between the materials and the
process media.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•
Adhere to the applicable regulations and take the neces-
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
•
Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant re-
gulations and take the necessary precautions when hand-
ling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
VARIAN assumes no liability and the warranty becomes null
and void if the end-user or third parties
•
disregard the information in this document
•
use the product in a non-conforming manner
•
make any kind of interventions (modifications, alterations
etc.) on the product
•
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, as well
as expendable parts (filament), are not covered by the
warranty.
Technical Data
Measurement principle
thermal conductance according
to Pirani
Measurement range
(air, O
2
, CO, N
2
)
5×10
-4
… 1000 mbar
Accuracy (N
2
)
1×10
-3
… 100 mbar
±15% of reading
5×10
-4
… 1×10
-3
mbar ±50% of reading
100 … 1000 mbar
±50% of reading
Resolution
1% of reading
Repeatability
1×10
-3
… 100 mbar
2% of reading
Output signal (measure-
ment signal)
Voltage range
VDC 0 … +10.3
Measurement range
VDC +1.9 … +10.0
Voltage vs. pressure
logarithmic
1.286 V/decade
Error signal
Filament rupture
V
V
0 … +0.5
+0.1
Output impedance
Ω
2×4.7
Minimum loaded imped-
ance
k
Ω
10, short-circuit proof
Response time
ms
80
Gauge identification
27.0 k
Ω
, referenced to supply
common (voltage at pin 4
≤
5 V)
Adjustment
one tactile switch for ATM and
HV adjustment
Switching functions
SP1, SP2
Threshold value indi-
cation and setting
one tactile switch at measure-
ment value output. Press briefly
for threshold indication. Keep
pressing or press repeatedly for
threshold setting.
Setting range
2×10
-3
… 500 mbar
Hysteresis
10% above lower threshold
Relay contact
closed
open
30 V, 0.5 ADC, floating
at low pressure (LED is lit)
at high pressure, error, missing
supply
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded extra-low vol-
tage (SELV). The connection to the gauge has to
be fused
1)
.
Supply voltage
At gauge
VDC +14 … +30
Ripple V
pp
≤
1
Current consumption
mA
<500
(max. starting current)
Power consumption
W
≤
1
Fuse required
1)
AT
(slow)
1
Electrical connection
FCC 68 / RJ45 appliance
connector, 8 poles, male
Sensor cable
8 poles plus shielding
Cable length
≤
100 m (8×0.14 mm
2
)
Grounding concept
→
"Power Connection"
Vacuum connection to
signal common
connected via 1 M
Ω
(voltage difference <15 V)
Supply common to
signal common
conducted
separately,
for
differential measurement
Materials exposed to
vacuum
DIN 1.4301, DIN 1.4305,
DIN 1.4435, glass, Ni,
NiFe
Filament
PVG-500
PVG-502
W
Ni
Internal volume
cm
3
≈
1.5
Admissible pressure
bar
(abs.)
10, limited to inert
gases
1)
VARIAN controllers fulfill these requirements.
