background image

 

 

Power Connection 

  Make sure the vacuum connection is properly made 

(

 "Vacuum Connection"). 

 

n

  If no sensor cable is available, make one according to 

the following diagram. 

 

7
3
5
4
1
2

8

6

27k

Ω

+

4.7

Ω

4.7

Ω

1M

Ω

+

+

Ident

SP2

SP1

<SP1> <SP2>

SP2

SP1

Measurement 

signal

Gauge with switching functions

Electrical connection
Pin 1 

Supply

Pin 2 

  Supply common, GND

Pin 3 

  Measurement signal

 or 

thresholds 

SP1/2

Pin 4 

  Gauge identification

Pin 5 

  Signal common

Pin 6, 8    Relay SP2, closing contact
Pin 7, 8    Relay SP1, closing contact

8-pole

FCC-68

connector

1

8

 

 

o

  Connect the sensor cable to the gauge and the control-

ler. 

 
 
 
 
 

 

Operation 

When the supply voltage is applied, the measurement signal 
is available between pins 3 and 5 (relationship between 
measurement signal and pressure 

 "Technical Data"). 

Allow a stabilization period of at least 10 minutes. It is advis-
able to operate the gauge continuously, irrespective of the 
pressure. 
 
 

 

Gas Type Dependence 

The measurement value is gas dependent. The pressure 
reading applies to dry air, O

2

, CO and N

2

. For other gases, it 

has to be corrected (

 "Technical Data"). 

If the gauge is operated with an VARIAN controller, a cali-
bration factor for correction of the actual reading can be ap-
plied (

 

 

 of the corresponding controller). 

 
 

 

Adjusting the Gauge 

The gauge is factory calibrated. Due to long time operation or 
contamination, a zero drift could occur. Periodically check the 
zero and adjust it if necessary. 
For adjusting the zero, operate the gauge under the same 
ambient conditions and in the same mounting orientation as 
normally. 
The gauge is adjusted to default values. However, it can also 
be adjusted to other pressure values, if the exact pressure 
value is known (reference measurement). 
 

n

  If you are using a seal with centering ring and filter, 

check that they are clean or replace them if necessary 
(

 "Deinstallation"). 

 

o

  Activate the gauge and operate it at atmospheric pres-

sure for at least 10 minutes. 

 

p

  Press the button with a pin (max. ø1.1 mm) and the 

ATM adjustment is carried out: The gauge is adjusted 
to 1000 mbar (10 VDC) by default. By pressing the 
button >5 s the pressure value is increased towards 
1200 mbar (or, by pressing it again, decreased towards 
500 mbar) until the button is released or the limit is 
reached. 

 

max. ø1,1 mm

ATM

HV

 

 

q

  Evacuate to p << 10

-4

 mbar (recommended) or to a 

pressure in the range of 10

-4

 … 10

-2

 mbar and wait at 

least 2 minutes. 

 

r

  Press the button with a pin and the HV adjustment is 

carried out: The gauge is adjusted to 1.2×10

-4

 mbar 

(1.1 VDC) by default. By pressing the button >5 s the 
pressure value is increased toward 1×10

-2

 mbar until 

the button is released or the limit is reached. 

 
 

 

Switching Functions 

The setpoints are adjustable within a pressure range of 
2×10

-3

 … 500 mbar (voltage range of 2.67 … 9.61 VDC). 

Each switching function provides a floating relay contact 
(

 "Electrical Connection"). 

LEDs 

The status of the switching func-
tion is indicated by a LED. 

 

Status

LED Relay 

off off 

deenergized 

 

Measurement signal
(Pressure p)

Time t

Me

asu

reme

nt value

Off

On

Hysteresis (10%
of threshold value)

Off

Threshold value

Setpoint

 

 
 

 

Adjusting the Setpoints 

 

 

DANGER

 

DANGER: malfunction 
If processes are controlled via the signal output, 
keep in mind that by pressing a button <SP> the 
measururement signal is suppressed and that 
the corresponding threshold value is output in-
stead. This can cause malfunctions. 
Press a button <SP> only if you are sure that no 
damages can arise from a malfunction. 

 

 

 

  The status of the relay and LED is not affected by 

pressing the button. 

 

n

 

Press the button <SP1> with a pin (max. ø1.1 mm): 
The gauge changes to the switching function mode and 
outputs the current lower threshold value at the 
measurement value output for about 5 s. When the 
button is kept depressed for more than 5 s, the 
threshold setting is modified until the button is released 
or until the limit of the setting range is reached. 

max. ø1,1 mm

Keep the button 

depressed

 

 

The upper thresh-
old is 10% above 
the lower one 
(hysteresis). 

 

o

 

When the button is pressed again within 5 s the thresh-
old setting is adjusted in the reverse direction. 

 

 

p

 

Release the button. The gauge resumes operation after 
5 s and the connected controller displays the current 
measurement value. 

 

The adjustment procedure for <SP2> is the same as de-
scribed for <SP1>. 
 
 
 
 
 

 

Deinstallation 

 

 

DANGER

 

DANGER: contaminated parts 
Contaminated parts can be detrimental to health 
and environment. 
Before beginning to work, find out whether any 
parts are contaminated. Adhere to the relevant 
regulations and take the necessary precautions 
when handling contaminated parts. 

 

 

 

 

Caution

 

Caution: vacuum component 
Dirt and damages impair the function of the vac-
uum component. 
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and 
prevent damages. 

 

 

 

 

Caution

 

Caution: dirt sensitive area 
Touching the product or parts thereof with bare 
hands increases the desorption rate. 
Always wear clean, lint-free gloves and use 
clean tools when working in this area. 

 

 

 

n

  Vent the vacuum system. 

 

o

  Put the gauge out of operation. 

 

p

  Unplug the sensor cable. 

 

q

  Remove the gauge from the vacuum system and install 

the protective lid. 

 
 
 
 
 

 

Maintenance, Repair 

In case of severe contamination or a malfunction, the sensor 
can be replaced. 

 

  Gauge failures due to contamination or wear and 

tear, as well as expendable parts (filament), are not 
covered by the warranty. 

VARIAN assumes no liability and the warranty becomes null 
and void if any repair work is carried out by the end-user or 
third parties. 
 
 

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