2000 MS Hardware Maintenance
76
System Start-up and
Shutdown
This represents a group of error messages indicating that the diffusion pump has
been shut down. To precisely identify the problem, the USER should go to the
Diagnostics tab, check “System Test and Run to Completion.”. Fault messages
may appear on startup or during operation.
•
Turn OFF main power by placing switch at rear of system to OFF (down)
position. Manually vent the system for at least 5 minutes using the lever
on the front panel.
CAUTION
DO NOT ATTEMPT to VENT SYSTEM by any other method (via transfer line,
foreline vacuum clamps, etc.). Rapid, improper venting of the system will
cause diffusion pump fluid to back stream into the manifold and ion trap.
Maintenance procedures should NOT be attempted until shutdown program
has completed!
