Varian TriScroll 300 Series, Manual

Page 1: ...D R A F T 6 1 1 0 3 MODULE REPLACEMENT MANUAL vacuum technologies TriScrollTM 300 Series Dry Scroll Vacuum Pump Manual No 699904285 Revision E May 2003 505 872 0037 idealvac com idealvac com...

Page 2: ...gies Varian TriScroll 300 Dry Scroll Vacuum Pump TriScroll is a trademark of Varian Vacuum Technologies Loctite and PST are registered trademarks of Loctite Corporation Krytox Teflon and Viton are reg...

Page 3: ...ol Kits viii Factory Service Options ix Serial Numbers Notes ix Contacting Varian Vacuum Technologies ix General Information 1 Equipment Required to Install Pump Module 1 Tools Required to Install Pum...

Page 4: ...esta declaraci n es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione c...

Page 5: ...hazardous conditions and know how to avoid them The consequences of work performed by unskilled or improperly trained maintenance personnel or careless operation of the equipment employed in the spec...

Page 6: ...thanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum If applicable apply a small amount of Krytox GPL 224 grease and wipe the O rings shiny dry...

Page 7: ...ip Seal Replacement Manual All TriScroll 300 Series Models 699904280 Installation and Operation Manual All TriScroll 300 Series Models 699904265 Description Contents Applicable TriScroll Model Part Nu...

Page 8: ...Technologies office if mating hardware is required Contacting Varian Vacuum Technologies In the United States you can contact Varian Vacuum Technologies Customer Service at 1 800 8VARIAN See the back...

Page 9: ...nacceptably high level for your application Bearings rotary seals and O rings should also be replaced if the pump exhibits humming or grinding noises from the bearings Main bearing life may be shorten...

Page 10: ...TriScroll 300 Dry Scroll Vacuum Pump 2 D R A F T 6 1 1 0 3 Maintenance Took Kit...

Page 11: ...3 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 6 1 1 0 3 Maintenance Took Kit continued...

Page 12: ...300 Dry Scroll Vacuum Pump 4 D R A F T 6 1 1 0 3 TriScroll Disassembly 1 Remove three M5x16 screws attaching cowling to module 2 Remove cowling 3 Remove the four M6x16 screws attaching pump module to...

Page 13: ...5 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 6 1 1 0 3 4 Remove pump module from the frame 5 Remove M8x12 screw and washer attaching fan assembly to crankshaft TriScroll Disassembly continued...

Page 14: ...TriScroll 300 Dry Scroll Vacuum Pump 6 D R A F T 6 1 1 0 3 6 Remove fan assembly from crankshaft 7 Remove key from slot in crankshaft TriScroll Disassembly continued...

Page 15: ...T 6 1 1 0 3 TriScroll Reassembly Tool required Allen wrench Locate the following items shown in the photos on the left Pump Module Assembly Fan Assembly M6x16 screws 4 Spider Coupling Washer Key M8x12...

Page 16: ...1 1 0 3 1 Install key in slot on crankshaft 2 Slide fan assembly onto crankshaft engaging key and against seal spacer 3 Secure fan assembly to crankshaft with M8x12 screw and washer previously removed...

Page 17: ...4 Insert spider in motor coupling 5 Install pump module on frame aligning fingers on fan assembly with fingers on coupling Assure proper fit of dowel pins on mating holes in frame TriScroll Reassembl...

Page 18: ...roll 300 Dry Scroll Vacuum Pump 10 D R A F T 6 1 1 0 3 6 Secure pump module to frame with four M6x16 screws 7 Install cowling over pump module Secure with three M5x16 screws TriScroll Reassembly conti...

Page 19: ...e Verification Pump Module conditioning and performance verification has been performed at Varian Vacuum Technologies factory Further conditioning or performance verification is not necessary This fig...