iii
TriScroll 300 Dry Scroll Vacuum Pump
DRA
FT 6/1
1/03
Contents
Declaration of Conformity
Preface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . . .vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . . .viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . . .viii
Factory Service Options . . . . . . . . . . . . . . . . . . . . .ix
Serial Numbers Notes . . . . . . . . . . . . . . . . . . . . . . .ix
Contacting Varian Vacuum Technologies . . . . . . . .ix
General Information . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Equipment Required to Install Pump Module . . . . . . 1
Tools Required to Install Pump Module . . . . . . . . . . 1
Maintenance Took Kit . . . . . . . . . . . . . . . . . . . . . . . . . 2
TriScroll Disassembly. . . . . . . . . . . . . . . . . . . . . . . . . . 4
TriScroll Reassembly . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Pump Conditioning and Performance Verification . 11
Request for Return Health and Safety Certification
