Varian Turbo-V70LP, Instruction Manual

Page 1: ...ies MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA OD...

Page 2: ...Turbo V 70LP...

Page 3: ......

Page 4: ......

Page 5: ...DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 BASE FIXING KIT INSTALLATION 31 AIR COOLING KIT I...

Page 6: ...rbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione ATTENZIONE Se per...

Page 7: ...inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa qu...

Page 8: ...nden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlage rung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuch...

Page 9: ...werden Damit die Flanschgrenztemperatur der Turbopumpe 120 C nicht berschreitet sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserk hlung arbeiten GEFAHR W hrend des Ausheizens d rfen wede...

Page 10: ...le stockage des pompes doi vent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes...

Page 11: ...de toucher la turbopompe ainsi que ses accessoires ven tuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulement de l air de la...

Page 12: ...tales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcio...

Page 13: ...La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta apr...

Page 14: ...observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n...

Page 15: ...opera es de aquecimento Utilizar sempre o resfriamento com gua durante as opera es de aquecimento PERIGO N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elev...

Page 16: ...en in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95...

Page 17: ...ns het verwarmen altijd waterkoeling toe GEVAAR Raak de pomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luc...

Page 18: ...unktion og driftssikkerhed i de turbomolekyl re pumper fra Varian S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 2...

Page 19: ...ventuelt tilbeh r under opvar mningsman vrerne Den h je temperatur kan for rsage kv stel ser p personer PAS P Til pumpens luftafl b anvendes luft eller en inaktiv luftart der er fri for st v og partik...

Page 20: ...f r att garantera optimal prestanda och drifts kerhet f r Varian turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20...

Page 21: ...en av pumploppet f r temperaturen vid inloppet aldrig bli h gre n 120 C Under uppv rmningen m ste vattenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r...

Page 22: ...Varian turbo molekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra...

Page 23: ...under oppvarmingen ADVARSEL Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inakti...

Page 24: ...aan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan...

Page 25: ...tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P stett ess pumppuun ilmaa tulee k ytt ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia...

Page 26: ...kat th metafor th diak nhsh kai thn apoq keush twn antli n den pr pei na uperba nontai oi ex j periballontik j sunq kej qermokras a ap 20 C wj 70 C scetik ugras a ap 0 wj 95 mh sumpukn simh o pel thj...

Page 27: ...NDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na diocete sete me a ra thn antl a cr...

Page 28: ...s the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started w...

Page 29: ...ies during the heating process The high temperatures may cause burns CAUTION Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar...

Page 30: ...ed air cooling to cool the pump in the cases where it is used under heavy load or when natural convection is insufficient for cooling purposes A thermistor sensor is mounted near the upper bearing to...

Page 31: ...requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 10 l h 0 05 GPM temperature 10 C to 30 C pressure 2 to 4 bar 30 to 60 Psi...

Page 32: ...ph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum...

Page 33: ...the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on either pump series and is supplied with a small tab for easy...

Page 34: ...tact with the pump wall to obtain fast and efficient heating Switch on the heater while the turbopump is in op eration If for any reason the turbopump body overheats it will be automatically cut out b...

Page 35: ...tic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be held on the respective noz zles using hose clips to avoid that the tube do not detach during operation The pl...

Page 36: ...not protrude from the other end Use the Allen key supplied for this purpose Turn the pump upside down CAUTION Before overturning the pump remove the protec tion screen if fitted Insert the three feed...

Page 37: ...w 9 l s 10 CFM input voltage 24 Vdc maximum power 2 16 W dimensions 60x60 mm 2 36x2 36 inches Open the package containing the feet and respec tive screws and install them as indicated in the in stalla...

Page 38: ...w the adapter 1 into the vent hole 2 of the pump Fix the valve 3 to the adapter 2 Tighten the valve using a 16 mm hexagonal span ner CAUTION Do not overtighten the valve as this may damage the thread...

Page 39: ...er It typically reduces the vibration transmitted from the Turbo V 70LP pump to the system by a factor of 20 6 Ionization gauge 7 Fore vacuum pump connecting flange 8 Oil mist eliminator Please refer...

Page 40: ...the screw threads protruding from the flange and between the nuts and flange Note that the 2 75 CF flange has six blind holes Attach the units and tighten each one in turn Re peat the sequential tigh...

Page 41: ...ed to the temperature sensor NTC type 30 K resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump...

Page 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Page 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Page 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...