INSTRUCTIONS FOR USE
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87-900-973-01
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions, im-
proper use by untrained persons, non-authorized interference
with the equipment or any action contrary to that provided for by
specific national standards.
The TV 1001 SEM series pumps are turbo-molecular pumps for
high and ultra-high vacuum applications and can pump any
type of gas or gas compound. They are not suitable for pump-
ing liquids or solid particles.
The pumping action is obtained through a high speed turbine
(max. 38000 rpm) driven by a high-performance 3-phase elec-
tric motor. The TV 1001 SEM is free of contaminating agents
and, therefore, is suitable for applications requiring a "clean"
vacuum.
It is equipped with auxiliary connectors to supply an additional
fan, to control the vent valve, to be controlled from a remote site
by means of an host computer connected through a serial line
(RS232 or RS485).
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equip-
ment. Detailed information is supplied in the appendix "Techni-
cal Information".
This manual uses the following standard protocol:
!
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not fol-
lowed correctly, could lead to serious injury.
!
CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
In order to guarantee the maximum level of performance and
reliability of Varian Turbomolecular pumps, the following guide-
lines must be followed:
•
when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded:
•
temperature range: -20 °C to 70 °C
•
relative humidity range: 0 to 95% (non condensing)
•
the turbomolecular pumps must be always soft-started
when received and operated for the first time by the cus-
tomer
•
the shelf life of a turbomolecular pump is 10 months from
the shipping date.
!
CAUTION
If for any reason the shelf life time is exceeded, the pump has
to be returned to the factory. Please contact the local Varian
Vacuum Sales and Service representative for informations.
PREPARATION FOR INSTALLATION
The TV 1001 SEM is supplied in a special protective packing. If
this shows signs of damage which may have occurred during
transport, contact your local sales office.
When unpacking the system, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
!
CAUTION
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum. Al-
ways use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the TV
1001 SEM. Nevertheless, it is advisable to keep it closed until it
is installed in the system, thus preventing any form of pollu-tion
by dust.
INSTALLATION
!
CAUTION
Do not remove the adhesive and protective cap before con-
necting the turbopump to the system.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk.
During operation, the following environmental conditions must
be respected:
-
maximum pressure: 2 bar above atmospheric pressure
- temperature: from +5 °C to +35 °C (see the diagram pres-
sure-temperature in the appendix “Technical Information”)
-
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information.
The TV 1001 SEM must be connected to a primary pump (see
"Technical Information").
