5-1
SECTION V
REPLACEMENT PARTS
The following parts are available from Varian; please call the 800 number listed inside the front cover
of this manual.
Table 5-1 Troubleshooting
Part Number
Description
86101301
Standard Cold Cap Assembly
F6455301
Extended Cold Cap Assembly
L8908301
Sight Glass Repair Kit
F3365301
Jet Assembly
F3373301
Splash Baffle
85840301
Foreline Baffle Assembly
642906025
Thermoswitch Kit
699006025
Standoff, ceramic insulating, cold cap
647306125
120V/2200 watt Heater Element
647306225
240V/2200 watt Heater Element
647306175
208V/2200 watt Heater Element
656179100
Wire, No. 10 stranded, nickel
648056680
Lugs, Replacement, nickel
86087001
Heater Insulator
86086301
Heater Clamping Plate
86088301
Heater Cover Plate
L8998001
Heater Insulating Blanket
L8997001
Heater Cover
K0377184
O-Ring Kit; includes:
3 Butyl inlet flange O-ring, Parker No. 2-267
3 Buna-N foreline flange O-ring, Parker No. 2-332
10 Viton fill and drain O-rings (old style). Parker No. 2-112
10 Viton fill and drain O-rings (new style), Parker No. 2-113
1 Sight glass O-ring, Parker No. 2-035
1 Sight glass O-ring, Parker No. 3-226
K6948301
NEOVAC SY Diffusion Pump Fluid (1000 cc)
695474005
DC-704 Diffusion Pump Fluid (500 cc)
695475005
DC-705 Diffusion Pump Fluid (500 cc)
695405005
Santovac 5 Diffusion Pump Fluid (500 cc)
86715001
Spring, Cold cap
Commercial
Screw, Rd hd machine, no. 6-32 x
3
⁄
16
, stainless steel
Commercial
Washer, flat, no. 6, stainless steel
Commercial
Washer, lock, no. 6, stainless steel
Commercial
Stud, no. 8-32 x
1
⁄
2
, stainless steel
Commercial
Screw, Socket hd cap, no. 8-32 x
1
⁄
4
, stainless steel
Summary of Contents for VHS-6
Page 27: ...Replacement Parts 5 2 ...
Page 28: ...Replacement Parts 5 3 ...