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ISO 9001
EN 29001
Installation, Operating, and Maintenance Instructions
Series 021
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 Email reception@vat.ch http://www.vat.ch
205440EC
2003-04-14
2/12
Intended Use of Product
Use product for vacuum applications under the conditions indicated in chapter «Technical data» only!
Other applications are only allowed with the written permission of VAT.
Description
Flange see
dimensional
drawing
Actuator
pneumatic, double acting, with position indicator,
mechanically locked in closed position
Feedthrough
welded metal bellows *)
Technical Data
Leak rate (FKM seals)
- valve body
< 1 . 10
-9
mbar l s
-1
- seat
< 1 . 10
-9
mbar l s
-1
Leak rate (FFKM seals)
- valve body
< 1 . 10
-8
mbar l s
-1
- seat
< 1 . 10
-7
mbar l s
-1
Pressure range
1 . 10
-9
mbar to 1.2 bar (abs)
Differential pressure on the gate
- in either direction
1.2 bar *)
Differential pressure at opening
≤
30 mbar *)
Cycle life between maintenance
- actuator
2 million *)
- bellows (under clean vacuum conditions)
2 million *)
- gate seal FKM (under clean vacuum conditions)
2 million
- gate seal FFKM (under clean vacuum conditions)
1 million
Operating temperatures
- valve body aluminum
<150°C
- valve body stainless steel
<200°C
- pneumatic actuator
<150°C
- position indicator
<80°C
- solenoid
<50°C
Temperature difference between seat and gate
≤
40°C
Heating and cooling rate
≤
40°C h
-1
Material
