Series 613
OPERATION
984360EC
Edition 12.08.2022
107/149
Optimizing I-Gain
While optimizing I-Gain, the gas flow determined above has to be constant all the time.
Start with P-Gain set to half of the value found when optimizing P-Gain and set I-Gain to 1.0.
Keep the P-Gain constant.
Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition
from SP2 to SP1 results in a significant pressure over shoot or if the valve position does not stabilize,
I-Gain is too high. If the transition results in a slow asymptotical pressure rise and there is still a
constant deviation to SP2, the I-Gain is too low.
The optimal value for I-Gain is found if the transition from SP2 to SP1 result in just a slight pressure
over shoot, a stable valve position and the actual pressure matches SP2 exactly.
Example:
Check control performance over the whole control range with parameters above.
Required information for support:
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Go to ‘Tools / Create Diagnostic File’ in ‘Control Performance Analyzer’ and save file
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Pressure / flow / gas conditions to be controlled
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Chamber volume
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Pumping speed (l/s) and pump type (e.g. turbo pump)
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System description
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Problem description
Send diagnostic file with and all required information to tuning-support@vat.ch
