26
10. Apply power to the source.
To avoid electrical shock, keep clear of “live” circuits.
Refer to the
“Tables” on page 83
for current limits for various ion
sources.
a. Press the SOURCE ON/OFF switch. The word SOURCE appears
above the switch.
•
When the SOURCE switch is activated, several changes will be
observable on the front panel:
• The cathode filament current will increase from 0.0 to the
programmed value.
• The neutralizer filament current will increase from 0.0 to the
programmed value.
•
When the neutralizer current is within 0.5A of the selected tar-
get, and the cathode current is greater than 0.75A, the dis-
charge voltage will increase to about 150V.
•
As the source discharge starts, the discharge current will
increase and the discharge voltage will decrease to the pro-
grammed value.
b. Increase the cathode current, if necessary.
1.) Select the Cathode power supply with the MODULE switch and
Current with the FUNCTION switch.
2.) Turn the Adjust knob clockwise until the discharge stabilizes or
until the recommended cathode current limit is reached.
When the current limit has been reached, cathode current may not be
increased.
If the discharge has not started before the recommended current
limit is reached:
1.) Reduce the cathode current.
2.) Select Cathode with the MODULE switch.
3.) Select Current with the FUNCTION switch.
4.) Turn the Adjust knob counterclockwise until the cathode current
reaches the original selected value.
If the discharge does not start (i.e., no discharge current) or is unstable,
and the discharge voltage oscillates between the approximate pro-
grammed value and 150V, insufficient cathode current or insufficient gas
flow could be the cause.
WARNING
NOTE
NOTE
Summary of Contents for MPS-3000 CE
Page 1: ...MPS 3000 CE Power Supply Technical Manual 425964...
Page 2: ...MPS 3000 CE Power Supply Technical Manual...
Page 90: ...86 Filament Cathode with Filament Neutralizer or PBN Option...
Page 91: ...87 Hollow Cathode and HCN 7 pin or 2 x 4 pin feedthrough...
Page 92: ...88 Hollow Cathode and Hollow Cathode Neut 6 pin feedthrough...
Page 93: ...89 Filament Cathode with Filament Neutralizer or PBN Option...
Page 94: ...90 3cm Source Filament Cathode and Filament Neutralizer...
Page 95: ...91 3cm Source Hollow Cathode and Hollow Cathode Neutralizer...
