43
To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-
out/tag out procedures before continuing.
Follow these steps for operation in Local mode:
1. Turn the facility mains breaker and the unit’s POWER switch (on the
power supply front) to the on position.
2. Wait for completion of the self-test procedure.
3. Select Local mode with the MODE switch. The word LOCAL appears
above the switch.
4. Select the chosen memory with the MEMORY switch. The parameters
stored in the selected memory location appears and may be verified on
the front panels.
5. The chamber pressure and ion source gas flow rate must be adequate
for the requested conditions.
6. Press the SOURCE switch. The word SOURCE appears above the
switch.
Consider the age of the filament when recalling values from memory. An
older filament does not require as much current as a new filament to start
or function.
MPS-3000 CE FC
The cathode filament current will ramp to the programmed value.
The neutralizer filament current will ramp to the value from memory.
•
When the neutralizer filament current is within 0.5A of the tar-
get current, and the cathode filament current is greater than
0.75A, the discharge voltage will rise to about 150V. As the
ion source discharge starts, a discharge current appears and
the discharge voltage will ramp to the value from memory.
MPS-3000 CE HC
The hollow cathode heater current will ramp to 7.25A.
•
When the internal hollow cathode has started, the heater cur-
rent will ramp down to 3.75A, and the keeper voltage should
drop below 25V.
The hollow cathode neutralizer heater current will ramp to 7.25A.
•
When the internal hollow cathode neutralizer has started, the
heater current will ramp down to 3.75A, and the keeper volt-
age should drop below 25V. The emission current will increase
to the programmed value after the keeper voltage drops below
the keeper voltage limit.
WARNING
NOTE
Summary of Contents for MPS-3000 CE
Page 1: ...MPS 3000 CE Power Supply Technical Manual 425964...
Page 2: ...MPS 3000 CE Power Supply Technical Manual...
Page 90: ...86 Filament Cathode with Filament Neutralizer or PBN Option...
Page 91: ...87 Hollow Cathode and HCN 7 pin or 2 x 4 pin feedthrough...
Page 92: ...88 Hollow Cathode and Hollow Cathode Neut 6 pin feedthrough...
Page 93: ...89 Filament Cathode with Filament Neutralizer or PBN Option...
Page 94: ...90 3cm Source Filament Cathode and Filament Neutralizer...
Page 95: ...91 3cm Source Hollow Cathode and Hollow Cathode Neutralizer...