4
Chapter 2: Overview
The MPS-3000 CE power supply system is specifically designed and opti-
mized to power and control Veeco ion beam sources.
•
The built-in microprocessor provides reliability and flexibility to
the user. The microprocessor automatically checks each of the
power supplies each time the system is turned on.
•
When an unsatisfactory condition occurs, an error code
appears on the power supply display. Refer to
“Troubleshoot-
ing/Error Code Definitions” on page 69
to determine the
cause and remedy to the problem.
•
Programmable limits on the power supplies allow the users to
adjust the system. On the neutralizer power supply, the fila-
ment current limit might be adjusted up or down as required,
depending upon the size and type of filament wire used.
•
Operate in Manual, Local, Local Restricted, or Remote mode.
Manual Mode
Each of the individual power supplies is controlled from the front panel.
Recall or store complete operating conditions from one of two nonvolatile
memories.
Use these steps to change a parameter:
1. Select a power supply with the MODULE select switch.
2. Select a parameter with the FUNCTION select switch.
3. Turn the Adjust knob to reach the chosen value.
Local Mode
Beam voltage, beam current, and accelerator voltage are adjustable from
the front panel when operating in Local mode. Recall or store two complete
sets of operating conditions from the two nonvolatile memories.
Local Restricted Mode
No adjustments may be made to any parameters from the front panel.
Recall operating conditions from the memory.
Summary of Contents for MPS-3000 CE
Page 1: ...MPS 3000 CE Power Supply Technical Manual 425964...
Page 2: ...MPS 3000 CE Power Supply Technical Manual...
Page 90: ...86 Filament Cathode with Filament Neutralizer or PBN Option...
Page 91: ...87 Hollow Cathode and HCN 7 pin or 2 x 4 pin feedthrough...
Page 92: ...88 Hollow Cathode and Hollow Cathode Neut 6 pin feedthrough...
Page 93: ...89 Filament Cathode with Filament Neutralizer or PBN Option...
Page 94: ...90 3cm Source Filament Cathode and Filament Neutralizer...
Page 95: ...91 3cm Source Hollow Cathode and Hollow Cathode Neutralizer...