Addendum A
– LPE 14 Liter Bubbler Change
MNL000629.doc
Revision 0
06/25/2019
Chemical Equipment
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
AD A-
6
9.
The operator is now prompted to remove and replace the Bubbler.
DO
NOT
press OK until the Bubbler is replaced.
10.
Isolate the coolant system by closing the valves on the coolant lines.
11.
Disconnect the coolant lines from the current Bubbler. Note there may be a
small amount of coolant at disconnect, be prepared to use towel to dry.
12.
Cap or plug any coolant ports.
13.
Disconnect the VCR valve connections on top of the Bubbler.
14.
Remove empty Bubbler.
15.
Install new Bubbler and reconnect VCR fittings.
16.
Connect the coolant lines to the new Bubbler.
17.
The system will perform an automatic pressure decay leak test check.
18.
Next post Venturi vacuum purge cycles will be performed followed by a
Leak Check, Vacuum Rate of Rise test.
19.
The operator is next prompted to open the valves closed in step 6.
20.
The operator is then prompted to enter the chemical net liquid weight and
current weight. Enter 15.4 for the 14 liter LPE bubbler. Then enter 0 for the
current liquid weight, then select OK.
21.
Controller status box in Bulk section will display CHANGE BLK Completed.
22.
The Change Bubbler operation is now complete.
