Chapter 2 - Site Preparation
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MNL000623.doc
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06/25/2019
Chemical Equipment
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Versum Materials Confidential
Table 2-8:
Chemical Bulk Refill Line Requirements
REMOTE
CHEM IN:
Chemical
Bulk Refill
Line from
the
BCD200,
CG010 or
CG310
6.35 mm (¼ in.) female VCR connection
316L stainless steel, electro-polished line
Connects to REMOTE CHEM IN port (See Figure 2-2)
Bends should meet SEMATECH standards for bend radius. Versum Materials, Inc.
recommends inside electro-polish rating 10RA maximum.
Chemical Refill Line should be Helium leak-checked, purged, and cleaned before
installing ChemGuard.
Optional Outer Coaxial Line (if required by customer or local regulations): 12.7 mm (½
in.) stainless steel.
2.2.9
Sample/Purge Output Manifold
The Output Manifold allows the cabinet to feed the gas mixture to the process tool as well as
a sample/purge port simultaneously. Manual sample/purge port is also available. The house
line can be plumb and ready to use by opening either of the manual valves.
2.2.10
Coolant Supply/Return (optional)
The ChemGuard® CG050 is configured with a standard coolant supply and return lines with
overpressure protection, shutoff, and drain capability built into the cabinet. The temperature
of the bubbler is typically maintained at 18° C.
Table 2-9:
Coolant Supply/Return Requirements
COOLANT
SUPPLY /
RETURN
Cabinet 12.70 mm (1/2 in.) Female NPT connection (See Figure 2-2)
Flow: 7.6 liters per minute (2 US gpm)
Pressure: Up to 2.75 barg (40 psig)
2.3 Tag and Lockout Routine
When performing certain maintenance procedures described in this manual, electrical power
to the ChemGuard® CG050 must be de-energized, using site lockout/tag out procedures.
Consult your company’s safety procedures for tagging and lockout instructions to be followed
when performing such maintenance.
It is the customer’s responsibility to ensure compliance with local electrical regulations
external to the equipment.
