21
■
Specifications
Performance
50mm
100mm
150mm
200mm
250mm
300mm
150mm
Ion balance(V)
0
0
0
0
0
0
+1000V
→
+100V(Sec.)
>10
>10
>10
>10
>10
>10
-1000V
→
-100V(Sec.)
>10
>10
>10
>10
>10
>10
100mm
Ion balance(V)
7
-5
-3
-2
-1
0
+1000V
→
+100V(Sec.)
>10
3.07
2.82
0.96
1.82
1.02
-1000V
→
-100V(Sec.)
>10
3.13
2.5
0.99
1.93
1.11
50mm
Ion balance(V)
-4
-2
-2
-1
0
0
+1000V
→
+100V(Sec.)
0.61
0.63
0.59
0.62
0.66
0.73
-1000V
→
-100V(Sec.)
0.74
0.59
0.58
0.64
0.67
0.77
±
0mm
Ion balance(V)
-3
-3
3
-1
0
-1
+1000V
→
+100V(Sec.)
0.59
0.57
0.63
0.61
0.64
0.71
-1000V
→
-100V(Sec.)
0.65
0.62
0.6
0.59
0.64
0.68
50mm
Ion balance(V)
-3
-2
-2
-1
-1
0
+1000V
→
+100V(Sec.)
0.61
0.58
0.59
0.65
0.69
0.75
-1000V
→
-100V(Sec.)
0.67
0.63
0.6
0.65
0.68
0.79
100mm
Ion balance(V)
-2
-2
-3
-1
-1
-1
+1000V
→
+100V(Sec.)
>10
4.69
3.46
2.47
1.2
2.32
-1000V
→
-100V(Sec.)
>10
6.5
3.04
3.09
1.32
2.39
150mm
Ion balance(V)
-10
-7
-1
0
0
0
+1000V
→
+100V(Sec.)
>10
>10
>10
>10
>10
>10
-1000V
→
-100V(Sec.)
>10
>10
>10
>10
>10
>10
*The measurement values were obtained using the VESSEL measurement environment, so error
could be induced depending on the operation environment.