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1. General notes 

 
Important

 

Before using the XRT-A for the first time, please read this manual carefully. This manual contains 
additional information on handling and care. 

Do not apply more than 1 N force on the rotor as this 

can lead to a damaged stage.

 

 

Cleaning 

Do not use any unsuitable cleaning agents, chemicals, grease/oil or techniques for cleaning. This 
could damage the surfaces and products could be contaminated by abraded particles.  

For vacuum 

and  cleanroom  applications,  gloves  are  required  to  avoid  contamination  of  the  device  during 
unpacking and installing the device.

 

Servicing 

Repairs may only be carried out by Xeryon’s trained service technicians. Only original Xeryon’s 

spare parts may be used. 

 

Authorised personnel

 

Please  ensure  that  the  XRT-A  is  installed  and  operated  by  authorized  and  trained  personnel.  All 
operators must have read and understood this user manual, and in particular the safety regulations.  
 

Place of use 

Avoid  large  temperature  fluctuations,  vibrations  and  shocks.  These  conditions  can  distort 
measurements and can even lead to a damaged stage. 
 

Humidity and dust 

Keep relative humidity limited to max. 80%. A higher relative humidity will damage the piezos inside 
the stage. Keep the stage away from dust. Excessive dust may affect the integrated bearings. 
 

Storage and transport 

Use the original packaging for shipping or transporting the XRT-A. In order to prevent damage from 
vibrations  and  shocks,  pack  and  lock  all  moving  parts  (according  to  this  manual)  in  their  original 
packaging and ship it appropriately. Store and transport the XRT-A in a closed container or plastic bag, 
free of dust and humidity. Add desiccant bag in closed container. Avoid excessive vibrations during 
transport. Storage temperature: 0 to +40 °C. 
 

Environment & health 

The  external  surfaces  of  the  device  do  not  contain  hazardous  materials  for  human  health  or  the 
environment. Inside the device however, PZT is present. The electronics are RoHs compatible. 

Do not throw in the garbage bin. Dispose of in a responsible matter, according to local legal regulations 

 
 
 
 

Summary of Contents for XRT-A

Page 1: ...Xeryon BVBA Interleuvenlaan 62 3001 Leuven Belgium All rights reserved No part of this manual may be duplicated reproduced stored in an information system or processed or transferred in any other for...

Page 2: ...of 14 www xeryon com Content Content 2 1 General notes 3 2 Introduction 5 3 Installation 7 4 Setup 8 5 Specifications and dimensions 10 6 DON Ts 11 7 Trouble shooting 12 8 Ordering code 13 9 Customer...

Page 3: ...y regulations Place of use Avoid large temperature fluctuations vibrations and shocks These conditions can distort measurements and can even lead to a damaged stage Humidity and dust Keep relative hum...

Page 4: ...eryon com Symbols used Warning of hazardous electrical voltage The XRT A is operated with a voltage of maximum 48 V DC Failure to comply can cause Hazards to personnel electric shock Functional distur...

Page 5: ...the stage The integrated optical encoder provides 6 25 millidegrees angular resolution 57600 positions turn The XRT A NM is made from non magnetic materials such as aluminium alloys copper alloys stai...

Page 6: ...Encoder power 5V 10 Ground piezo 1 2 3 Encoder ground 11 4 Piezo 2 12 5 Piezo 1 13 6 Index 14 7 A 15 8 B Table 1 Pin layout D sub 15 HD connector Remark Be careful to avoid that the voltage intended f...

Page 7: ...ny shock or load higher than 1 N on the stage as this can cause irreparable damage Fix the sample to the rotor using the four M2 screw holes Overcome excessive forces on the stage while screwing the b...

Page 8: ...ter with the driver and repeat the steps described above until the green LED Connected to driver lights up 6 Click on the button Amplifier The green LED Enabled should light up now 7 Click Find index...

Page 9: ...tings and driver 8 Run automatically the selected program The green LED Program running will light up when the program is running Via the browse button one can search and select the program that is be...

Page 10: ...to 30 C Operating pressure Ambient pressure or vacuum3 10 6 mbar Magnetic field Max 1 5 Tesla4 static field Radial error motion in the direction of compensation 0 5 m Axial error motion 0 5 m Tilt wob...

Page 11: ...top plate of the stage without lifting the load Overcome excessive forces on the stage while screwing bolts in the top plate Do not drill holes or mill features in the stage You would probably damage...

Page 12: ...he saw tooth Motor rotates but encoder does not produce any output Check wiring to and from encoder Check presence of A B encoder signals with a scope or multimeter A red light produced by the encoder...

Page 13: ...ering code XRT A S AC A NM example code Material option NM non magnetic NA non anodized Atmosphere A normal atmosphere HV high vacuum 10 6 mbar Error motion compensation AC active compensation NC no c...

Page 14: ...V1 2 Page 14 of 14 www xeryon com 9 Customer service Phone 32 0 16 39 48 24 Address Interleuvenlaan 62 3001 Leuven Belgium Contact info xeryon com Website www xeryon com...

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