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SI1906002E-001=YSP10 installation and adjustment procedures
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9. Line alignment procedures
Adjust the machine base height and the board transfer condition between YSP10 and adjacent
machines.
9.1. Remove the lower cover on the rear side
Remove the rear side lower cover so that a jack and other tools can be set under the machine base.
The holes of the rear side cover are keyhole-shaped (both upper and lower covers), that can be removed
by simply loosening the screws.
Loosen 6 screws on the rear upper cover using a Phillips screwdriver.
Remove the rear upper cover by uplifting a little and pulling out. *1
Loosen 4 screws on the rear lower cover using a Phillips screwdriver.
Remove the rear lower cover by uplifting a little and pulling out.
*1 For YSP10 with automatic mask exchange unit, the rear lower cover can be removed without removing the rear
upper cover.
9.2. Preparation for the front side
Open the lower front door to lift the maintenance door.
Lower front door
Maintenance door