Yamato PDC510 Instruction Manual Download

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Table of Contents

1. SAFETY PRECAUTION

1. SAFETY PRECAUTIONS

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Description of Warning Symbols .............................................................................. 1

A List of Symbols ...................................................................................................... 2

Warning and Caution ................................................................................................ 3

2. PRIOR TO USE

2. PRIOR TO USE ................................

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Precautions for Installation ....................................................................................... 4

3. COMPONENTS AND FU

3. COMPONENTS AND FUNCTIONS

NCTIONS

NCTIONS ................................

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Main Unit .................................................................................................................. 5

Back of the Main Unit ............................................................................................... 6

4. INSTALLATION METH

4. INSTALLATION METHOD

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Required Equipment / Methods to Connect Cables and Tubes ................................ 7

Processing Mode Changeover Method .................................................................... 8

Auto-Tuning adjustment procedure .......................................................................... 9

5. RUNNING PROCEDURE

5. RUNNING PROCEDURE ................................

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Operation in Auto Run ............................................................................................ 10

Running Procedure ................................................................................................ 11

Touch Panel Operation ........................................................................................... 13

6. PRECAUTIONS FOR H

6. PRECAUTIONS FOR HANDLING

ANDLING

ANDLING ................................

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Warning and Caution .................................................................................. 19

7. MAINTENANCE

7. MAINTENANCE ................................

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Daily Inspection ...................................................................................................... 20

Periodic Inspection ................................................................................................. 21

8. ALARMS AND CORREC

8. ALARMS AND CORRECTIVE ACTIONS

TIVE ACTIONS

TIVE ACTIONS................................

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Alarms and Corrective Actions ............................................................................... 22

9. AFTER

9. AFTER----SALE SERVICE AND WAR

SALE SERVICE AND WAR

SALE SERVICE AND WARRANT

RANT

RANTY

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Request for Repair ................................................................................................. 23

10. SPECIFICATIONS

10. SPECIFICATIONS ................................

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Specifications ......................................................................................................... 24

11. WIRING DIAGRAM

11. WIRING DIAGRAM ................................

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12.GAS/PRESSURE DELI

12.GAS/PRESSURE DELIVERY MODULE

VERY MODULE

VERY MODULE ................................

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13.

13. PARTS LIST

PARTS LIST

PARTS LIST ................................

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14. DISPOSAL

14. DISPOSAL ................................

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Precautions for Disposal ........................................................................................ 28

15. LI

15. LIST OF HAZARDOUS SUBS

ST OF HAZARDOUS SUBS

ST OF HAZARDOUS SUBSTANCES

TANCES

TANCES ................................

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Summary of Contents for PDC510

Page 1: ... ensure proper handling of the machine please read this instruction manual and the warranty thoroughly After reading the manual please keep it together with the warranty in a safe place where it is available any time necessary WARNING Prior to using the product carefully read all warning instructions contained in the man ual and understand them fully ...

Page 2: ......

Page 3: ...ANDLING 19 19 19 19 Warning and Caution 19 7 MAINTENANCE 7 MAINTENANCE 7 MAINTENANCE 7 MAINTENANCE 20 20 20 20 Daily Inspection 20 Periodic Inspection 21 8 ALARMS AND CORREC 8 ALARMS AND CORREC 8 ALARMS AND CORREC 8 ALARMS AND CORRECTIVE ACTIONS TIVE ACTIONS TIVE ACTIONS TIVE ACTIONS 22 22 22 22 Alarms and Corrective Actions 22 9 AFTER 9 AFTER 9 AFTER 9 AFTER SALE SERVICE AND WAR SALE SERVICE AND ...

Page 4: ...ture poisoning etc which will entail after effects and those which will require hospitalization or long time treatment to be cured Note 2 Minor injury refers to injuries electric shock etc which will not require hospitalization or long time treatment to be cured Note 3 Damage to property refers to damages to property such as facilities equipment and buildings Meaning of Symbols This symbol indicat...

Page 5: ...bols WARNING General High Voltage High Temp Drive Unit Explosion CAUTION General Electric Shock Burn PROHIBITED General No Disassembly No Contact COMPULSORY General Connect Ground Wire Install Horizontally Unplug Power Periodic Inspection ...

Page 6: ...ust not be disassembled or modified by the user Unauthorized disas sembly and modification are a cause of failure fire electric shock and other accidents 5 Handling of the power cords Do not use bundled power cords Such a way of use may cause the cords to overheat to cause a fire Do not machine power cords or bend twist or pull them by undue force Hazard of a fire and electric shock Do not damage ...

Page 7: ...lace where ambient temperature rises above 35 A place where temperature changes largely A place filled with dust or a humid place A place under direct sunlight A place that is subjected to vibrations 3 Install the machine on a level foundation Install the machine on a level foundation If the machine is not in contact with the floor uniformly vibration and noise may be produced Also unexpected trou...

Page 8: ...various keys and show various information Operation power switch When this button is pressed electricity is applied to the touch panel and other parts of the machine to set the machine ready to run Emergency stop switch button Press this button when an emergency situation occurs When this button is pressed the RF power vacuum pump and opera tion panel power are turned off To reset the button turn ...

Page 9: ...e by a line other than the attached power cord or to ground measuring instruments Vacuum nozzle Connect the vacuum pump with the attached flexible tube Nitrogen N2 gas nozzle Connect piping from the N2 gas cylinder Adjust the pressure to the range of 0 2 MPa to 0 3 MPa Argon Ar gas nozzle Connect piping from the Ar gas cylinder Adjust the pressure to the range of 0 15 MPa to 0 25 MPa Oxygen O2 gas...

Page 10: ... must be laid by the user The machine requires an electric capacity of 3 phase 220 VAC 16 A or more Connect the red white and black cables to the R S and T phases respectively The green cable is for grounding Connect it to the terminal of Class D Ground Work 3 Vacuum pump Install the vacuum pump by the following procedure Referring to the attached vacuum pump instruction manual fill oil to the vac...

Page 11: ...ermine which mode is to be used and set the changeover lever to the desired side 1 Remove the front transparent plate of the changeover box M4 screws 4 pieces 2 Loosen the four screws M5 colored red They need not be removed 3 Set the changeover lever to the required mode as shown below and secure it with four screws 4 Attach the transparent plate and then attach the left side face plate 5 When the...

Page 12: ...amber does not get in the matching range High frequency has to need to take matching for load in the chamber If can not take matching Reflection wave become bigger and then RF power does not descend effectively for the load sample in the chamber Also in this case sometimes RF generator will become broken cause Auto tuning adjustment switch location is inside left side panel １ Release interlock swi...

Page 13: ...l appear Set gas flow rates RF power and RF pro cessing time If they need not be changed from the previous setting they need not be set Set alarm conditions such as the RF power permissible fluctuation range and gas flow rate permissible fluctuation ranges If they need not be changed from the previous setting they need not be set Set the work in the chamber and close the door Press the START key T...

Page 14: ...oor and take out the work To prevent overlapped processing the machine is designed to prevent the start of the next process before the door is opened Similarly set the next work in the chamber and repeat the procedure 2 When the processing parameters need to be set Press the SETUP key in the process screen to display the SETUP PROCESS PARAM ETER screen Set CLEANING TIME RF POWER Ar GAS and O2 GAS ...

Page 15: ...l situation occurs the buzzer sounds and the alarm state is shown on the touch panel Check the problem and take corrective actions The buzzer can be stopped with the BUZZER OFF key After the corrective actions press the RESET key The vacuum pump will run and the pro cess screen will appear Follow the normal procedure 6 Emergency stop Use the emergency stop switch to stop the machine immediately wh...

Page 16: ...l screen This screen will appear automatically when the power is turned on While this screen is being shown the controller performs initial setting There is nothing to be done by the operator Initial screen Process screen Process parameter setting screen Alarm condition setting screen Maintenance screen Alarm screen Leak test screen Parameter setting screen Status screen ...

Page 17: ...processing parameters Changes to the status screen to show RF power reflected waves gas flow rate etc during pro cessing Starts the process Stops the process When the squares are pressed from the left in sequence the maintenance screen will appear In the maintenance screen evacuating gas filling and RF on off operations can be per formed independently When the squares are pressed from the left in ...

Page 18: ...lear it After the entry press the PROCESS key to return to the process screen To set alarm conditions press the ALARM key to display the SETUP ALARM CONDITION screen Using the numeric keys enter a value to a place where the cursor is blinking After entering a value press the ENT key If the ENT key is not pressed the previous value re mains unchanged When the ENT key is pressed the cursor moves to ...

Page 19: ...ng the numeric keys enter a value to a place where the cursor is blinking After entering a value press the ENT key If the ENT key is not pressed the previous value re mains unchanged When the ENT key is pressed the cursor moves to the next item Enter a value similarly If a wrong value has been entered press the CLR key to clear it After the entry press the PROCESS key to return to the process scre...

Page 20: ...it Each time the O2 GAS key is pressed the supply of O2 gas is turned on and off Each time the Ar GAS key is pressed the supply of Ar gas is turned on and off Each time the RF key is pressed the RF is turned on and off Each time the MAIN VALVE key is pressed evacuating is turned on and off When the END key is pressed N2 gas is filled to the chamber When the chamber has been re turned to the atmosp...

Page 21: ...is no prob lem Shows the ultimate vacuum after 20 minutes OK when below 10 Pa The valve of the evacuating line is closed and the chamber is closed completely 20 minutes after the start of evacuating Leak is detected by a change in the degree of vacuum When a pressure rise is 20 Pa or be low after 20 minutes there is no problem in the cleaning performance Starts the leak test A series of ex haustin...

Page 22: ...t is a fire or electric shock may occur Never try to repair the machine by yourself It is a very dangerous practice 3 Dry the work If the work is wet a very long evacuating time is required which may cause the evacuation alarm Also water may deposit in the vacuum pump to deteriorate the evacuating perfor mance Be sure to dry the work prior to plasma cleaning 4 Do not bring the work in contact with...

Page 23: ...15 to 0 25 MPa Purge gas 0 2 to 0 3 MPa 4 Gas connect port Gas leak No gas leak 5 Vacuum exhaust connect port Tightness Not loose 6 Commercial in put line Connection No loose connectors No abnormal temperature rise of connectors 7 Vacuum pump Oil level Within the level lines Oil color Not contaminated Noise No abnormal noise Vibration No abnormal vibration Oil leak No leak Connection wires No loos...

Page 24: ...by No Place Method Criteria Result Remarks 1 Retighten connec tion screws All motion at a stop Not loose 2 Retighten piping joints All motion at a stop Not loose 3 Replace O rings All motion at a stop No damage or adhesion of foreign matter 4 Earth leakage breaker Under the normal oper ating conditions Turned off when the breaker s red button is pressed 5 Emergency stop button Under the normal ope...

Page 25: ...ced because the vacuum is too high or low Supply the process gas to ensure the vacuum in the chamber is in the range of 100 Pa to 1 Pa Evacuating time over The alarm condition VACUUM TIME is too short Increase the value Set this based on the default value 2 min The evacuating time becomes longer because of wet work Dry the work before plasma cleaning Vacuum is leaking because of such problems as f...

Page 26: ...torage Term of Stock Part s for repair The Unit is manufactured by the customized specification Therefore the repair parts will be in stock around 1 one year Some of the repair part s will be hard to get on time so that those parts must be prepared or be bought as the device part s in advance In case for the discontinued parts we will let you know the substi tuted part s however Unit may not be ke...

Page 27: ...CD touch panel High frequency power supply High frequency output power 50 500W Reference oscillator Quartz oscillator Oscillation frequency 13 56 MHz Output setting method Manual setting on the touch panel Matching method Auto tuning Vacuum pump Model Alcatel T2033SD Effective exhaust speed 450 533 L min 50 60 Hz Suction port shape NW25 Exhaust port shape NW40 Motor rated output 1 1ｋW Gas system P...

Page 28: ...25 11 WIRING DIAGRAM ...

Page 29: ...solenoid valve Main solenoid valve Main solenoid valve Main solenoid valve Ｖ２Ｖ２Ｖ２Ｖ２ Solenoid valve Solenoid valve Solenoid valve Solenoid valve Ｖ３Ｖ３Ｖ３Ｖ３Ｖ４Ｖ４Ｖ４Ｖ４Ｖ５Ｖ５Ｖ５Ｖ５ Speed control valve Speed control valve Speed control valve Speed control valve Ｖ６Ｖ６Ｖ６Ｖ６ Solenoid valve Solenoid valve Solenoid valve Solenoid valve S S S S V 6 V 6 V 6 V 6 V 7 V 7 V 7 V 7 Manual valve Manual valve...

Page 30: ...０１０ Ceramics YAMATO SCIENTIFIC CO LTD Insulating collar ２ＰＤＣ２１４０８００ Teflon YAMATO SCIENTIFIC CO LTD Shaft for electrode ＰＤＣ２１３０７８０ Aluminum YAMATO SCIENTIFIC CO LTD Holder ＰＤＣ２１３０７７０ Aluminum YAMATO SCIENTIFIC CO LTD O ring for electrode Ｖ４０ Viton YAMATO SCIENTIFIC CO LTD O ring for observation window Ｖ５５ Viton YAMATO SCIENTIFIC CO LTD O ring for Front door Rear panel Ｖ４３０ Viton YAMATO SCIENTI...

Page 31: ...al Major components of the main unit Enclosure Steel plate melamine epoxy composite resin paint Chamber door Aluminum A5052 Insulating plate Ceramics Check window Pilex Piping piping joint SUS304 SUS316 Suction exhaust valve Aluminum A6063 SUS316 Major components of the electrical system Switch relay Resin copper and other composite materials PC board Glass fiber and other composite materials Powe...

Page 32: ...ium perchlorate and other per chlorates Potassium peroxide sodium peroxide barium peroxide and other inorganic perox ides Potassium nitrate sodium nitrate ammonium nitrate and other nitrates Sodium chlorite and other chlorites Calcium hypochlorite and other hypochlorites Flammable Ethyl ether gasoline acetaldehyde propylene chloride carbon disulfide and other substances whose flash point is below ...

Page 33: ...operations or actions which are prohibited in this manual Such a practice may become a cause of unexpected accidents and failures Notice This instruction manual is subject to change without notice in the future If you notice the manual is missing pages or not in order please inform us Instruction Manual Plasma Cleaner Version 1 March 29 2010 Customer Support Center Yamato Scientific Co Ltd 2 1 6 N...

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