19
7. RUNNING PROCEDURE
Running Procedure
1) How to start the machine
Start the machine by the following procedure:
①
Supply 3-phase, 200 -230V VAC power to the machine.
First switch the power terminals
Make sure that the switches on the control assembly and the ELB are OFF and securely
connect the power cord to a power supply meeting the specified voltage and current.
The standard specification for the power supply is AC200V. When you use this product at a
place where AC208V or AC230V is used, switch the terminals inside unit before connecting
the power supply. The terminal block can be found on the transformer inside the right side
of the unit.
②
Turn on the circuit breaker on the machine.
③
Turn on the operation power switch.
④
The touch panel shows the initial screen several seconds and then shows the process
screen to set the machine ready to run.
2
）
Processing procedure and operating method
When the machine has been started, plasma-clean the work by the following procedure:
（
1
）
When the processing parameters need not be set:
①
Set the work in the chamber and close the door.
②
Press the AUTO Screen key.
③
Press the START key.
④
The controller automatically performs the process according to the set parameters.
⑤
The end of process is displayed.
⑥
Open the door and take out the work.
※
To prevent overlapped processing, the machine is designed to prevent the start of the
next process before the door is opened.
⑦
Similarly, set the next work in the chamber and repeat the procedure.
（
2
）
When the processing parameters need to be set:
①
Press the PROCESS SETUP, SECRET NO INQUIRY, RECIPE keys on the SELECT
screen to display the PROCESS SETUP screen.
②
Set RE processing time, RF POWER, Ar GAS and O2 GAS.
③
Press the PROCESS??? key to return to the process screen.
④
To begin processing, follow the procedure in (1) above.
。
（
3
）
When the alarm conditions need to be set:
①
Press the PROCESS SETUP, SECRET NO INQUIRY keys on the SETUP screen to
display the ALARM SETUP screen.
②
Set alarm conditions such as RF PERMISSIBLE LEVEL, GAS PERMISSIBLE LEVEL,
etc.
。
③
Press the FIRST WINDOW key to return to the process screen.
Summary of Contents for PDC610
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